量子电子学报 ›› 2026, Vol. 43 ›› Issue (2): 210-217.doi: 10.3969/j.issn.1007-5461.2026.02.004

• 先进光电检测与量子技术 • 上一篇    下一篇

InGaAs SPAD 光子符合检测读出电路设计 (特邀)

陈力颖 1,2*, 王辰阳 1,2, 李榜添 1,2, 曹凌风 1,2, 程传同 3   

  1. 1 天津工业大学电子与信息工程学院, 天津 300387; 2 天津工业大学, 天津市光电检测技术与系统重点实验室, 天津 300387;3 中国科学院半导体研究所, 北京 100083
  • 收稿日期:2025-03-26 修回日期:2025-06-03 出版日期:2026-03-28 发布日期:2026-03-28
  • 通讯作者: E-mail: nkchenliy@163.com E-mail:E-mail: nkchenliy@163.com
  • 作者简介:陈力颖 ( 1976 - ), 博士, 副教授, 硕士生导师, 河北大厂县人, 主要从事射频集成电路、模拟集成电路、数模混合集成电路方面的研究。E-mail: nkchenliy@163.com
  • 基金资助:
    国家重点研发计划 (2018YFA0209000), 国家自然科学基金青年项目 (61904173)

Design of photon coincidence detection readout circuitbased on InGaAs SPAD (Invited)

CHEN Liying 1,2*, WANG Chenyang 1,2 , LI Bangtian 1,2 ,CAO Lingfeng 1,2 , CHENG Chuantong   

  1. 1 School of Electronics and Information Engineering, Tiangong University, Tianjin 300387; 2 Tianjin Key Laboratory of Photoelectric Detection Technology and System, Tiangong University, Tianjin 300387;3 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
  • Received:2025-03-26 Revised:2025-06-03 Published:2026-03-28 Online:2026-03-28

摘要: 为了抑制环境光和单光子雪崩二级管 (SPAD) 的暗计数对读出电路性能的影响, 针对InGaAs SPAD, 设计了具有光子符合检测功能的读出电路。该设计在淬灭电路中集成了光子符合检测电路, 可根据环境光强度选择4个检测档位, 仅当时间窗口内检测到的脉冲数达到阈值时, 才判定为有效光子事件, 从而有效减弱了环境噪声的影响, 读出电路的信号背景比可达5.44; 在时间数字转换器 (TDC) 上采用动态分配电路, 减少了TDC的数量, 功耗和数据量分别降低到非动态分配TDC电路的62.5%和60%。仿真验证结果表明, 在SMIC 180 nm BCD工艺下, 得益于延迟锁定环的精确控制, 该 TDC 在不同工艺角和工作温度下, 均可实现 250 ps 的分辨率。其转换线性度的最差值分别为: 差分非线性为−0.6倍最低有效位 (简称LSB), 积分非线性为0.2 LSB, 两项指标均优于±1 LSB。

关键词: 单光子雪崩二级管, 光子符合检测, 动态分配, 时间数字转换器

Abstract: In order to suppress the effects of ambient light and the dark count of single-photon avalanche diode (SPAD) on the performance of readout circuits, a readout circuit with photon coincidence detection function was designed for InGaAs SPAD in this work. In the design, the quenching circuit integrates the photon coincidence detection circuit, which can operate in 4 different detection levels according to the intensity of ambient light. Only when the number of pulses detected within the time window reaches a threshold, it is determined to be an effective photon event, which effectively reduces the influence of ambient noise. And the signal to background ratio of the readout circuit can reach 5.44. Additionly, the time-to-digital converter (TDC) in the design adopts a dynamic allocation circuit, which reduces the number of TDCs, and decreases the power consumption and data volume to 62.5% and 60% of anon-dynamic allocation TDC circuit, respectively. The simulation verification results show that, under the SMIC 180 nm BCD process, the TDC can achieve a resolution of 250 ps at different process angles and temperatures through precise control of the delay-locked loop. The worst-case conversion linearity values are as follows: the differential nonlinearity is −0.6 times the least significant bit (LSB), and the integral nonlinearity is 0.2 LSB, both of which are better than ±1 LSB.

Key words: single-photon avalanche diode, photon coincidence detection, dynamic allocation, time-to-digital converter

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