重复率激光的单个脉冲能量检测技术

J4 ›› 2010, Vol. 27 ›› Issue (3): 281-287.

重复率激光的单个脉冲能量检测技术

梁勖,游利兵,余吟山

中国科学院安徽光学精密机械研究所合肥 230031

出版日期:2010-05-28 发布日期:2010-05-11
通讯作者: 余吟山（1982-），研究员，从事准分子激光技术研究工作。 E-mail:ysyu@aiofm.ac.cn
作者简介:梁勖（1982-），博士研究生，现从事准分子激光控制系统研究工作。Email:liangxu-lx@ustc.edu

Excimer laser pulse energy detecting under pulse repetition running mode

LIANG Xu , YOU Li-bing , YU Yin-shan

AnHui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Herfei 230031, China

Published:2010-05-28 Online:2010-05-11

摘要/Abstract

摘要：

介绍了一种基于热释电探头的准分子激光能量检测系统，实现了对0～200Hz重复率运行的准分子激光单个脉冲及多脉冲系列的能量实时检测。它由探头、放大、峰值保持、MCU、显示和通讯几部分组成，解决了闸流管放电强电磁干扰等难点，并在193nmArF和248nmKrF准分子激光器上进行了测试：响应时间4ms、分辨率10 、灵敏度0.5 、精度 3％。本系统既可作为能量计使用，也可以作为检测环节用于脉冲能量闭环稳定系统中，如采用响应速度更高的光电管，有望实现高重复率准分子激光光源的实时脉冲能量检测和稳定等技术。

关键词: 激光技术｜准分子｜热释电｜能量反馈｜实时检测

Abstract:

An Excimer Laser pulse energy detecting system was introduced, which is able to pick out either a single pulse energy or the individual energy of a desired series of pulses during the laser runs in a pulse repetition mode up to 200Hz. By use of a pyroelectric detector as energy sensor the system consists of amplifiers, peak-holding circuits, MCU, display and communication interface. Owing to an excellent interference suppressor circuit design the system run well even if the thyratron discharging EMI is very strong. Tested on the 193nm ArF and 248nm KrF Excimer laser the system behaved as follows: response time-4ms, power resolution-10 , sensitivity-0.5 and power accuracy- 3％. This system could be used as an energy-meter alone or be as a real time detector in a closed feedback loop for laser pulse energy stabilization. After substituting the pyroelectric detector with a photomultiplier tube it is expected that the system would be suitable for repetition rate higher than 1kHz.

Key words: laser techniques｜excimer｜pyroelectric｜feedback｜real time

梁勖,游利兵,余吟山. 重复率激光的单个脉冲能量检测技术[J]. J4, 2010, 27(3): 281-287.

LIANG Xu , YOU Li-bing , YU Yin-shan. Excimer laser pulse energy detecting under pulse repetition running mode[J]. J4, 2010, 27(3): 281-287.

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