凸非球面无光焦度双透镜Hindle检验研究

J4 ›› 2017, Vol. 34 ›› Issue (3): 272-277.

凸非球面无光焦度双透镜Hindle检验研究

姚劲刚¹,郑列华¹,郝沛明²

1中国科学院上海技术物理研究所公共技术室, 上海 200083； 2同济大学物理系, 上海 200083

收稿日期:2016-04-25 修回日期:2016-07-06 出版日期:2017-05-28 发布日期:2017-05-22
通讯作者: 郑列华（1966-），博士，研究员，主要从事光机系统工程方面的研究。 E-mail:E-mail：dimo818@126.com
作者简介:：姚劲刚（1989-），博士生，主要研究方向为光学检测及光机结构设计。 E-mail：121922417@qq.com

Hindle testing of convex aspheric double-lens with zero-focal power

1 Department of Public Technology，Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083，China； 2 Department of Physics，Tongji University, Shanghai 200083, China

Received:2016-04-25 Revised:2016-07-06 Published:2017-05-28 Online:2017-05-22

摘要/Abstract

摘要： 为实现小口径Hindle透镜对大口径凸非球面的高精度检测，提出了一种新的凸非球面无光焦度双透镜Hindle检验方法，通过加入无光焦度校正透镜有效解决了传统Hindle检验的不足。对口径180 mm、半径380 mm、偏心率2.8的凸非球面进行了设计分析，分别给出了不同光焦度分配及改变无光焦度双透镜间距时系统的残余波像差曲线图，得出较优的系统残余波像差为0.0006λ，验证了该方法的可行性。

关键词: 几何光学；Hindle 检验；无光焦度透镜；凸非球面检测

Abstract: In order to realize high precision measurement of large aperture convex aspheric surface with small aperture Hindle lens, a new Hindle testing method of convex aspheric double-lens with zero-focal power is proposed. The shortcomings of traditional Hindle test are solved effectively by adding correction lens with zero-focal power. The design and analysis of the convex aspheric surface with the aperture of 180 mm，radius of 380 mm and eccentric ratio of 2.8 are carried out. The residual wave aberration curves of the system are given respectively by different focal power distribution and changing the distance between two lenses with zero-focal power. A better system residual wave aberration of 0.0006λ is obtained, and the feasibility of the method is verified.

Key words: geometric optics; Hindle testing; zero-focal power lens; convex aspheric testing

姚劲刚郑列华郝沛明. 凸非球面无光焦度双透镜Hindle检验研究[J]. J4, 2017, 34(3): 272-277.

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