基于365nmLED的数字光刻照明系统的匀光设计

J4 ›› 2018, Vol. 35 ›› Issue (2): 225-229.

基于365nmLED的数字光刻照明系统的匀光设计

梁庆九,周金运

广东工业大学物理与光电工程学院，广东广州 510006

收稿日期:2017-03-01 修回日期:2017-03-20 出版日期:2018-03-28 发布日期:2018-03-30
通讯作者: 周金运(1962-)，博士，教授，博士生导师，主要从事工程光学方面的研究。E-mail: 705103662@qq.com
作者简介:梁庆九(1991-)，湖南人，研究生，主要从事光刻方面的研究。E-mail:250817369@qq.com
基金资助:
Supported by National Natural Science Foundation of China（国家自然科学基金，61475037），2016 Guangdong Science and Technology Development Special Fund（2016广东省科技发展专项资金，2016B090918124）

Uniform light design of digital lithography illumination system based on 365 nm LED

LIANG Qingjiu, ZHOU Jinyun

School of Physics and Optoelectronic Engineering, Guangdong University of Technology, Guangzhou 510006, China

Received:2017-03-01 Revised:2017-03-20 Published:2018-03-28 Online:2018-03-30

摘要/Abstract

摘要： 在数字光刻照明系统中，利用复眼透镜对365 nm发光二极管（LED）进行了匀光设计，透镜阵列采用近六边形的排列方式，能基本覆盖圆形光。近六边形阵列相对于方形结构能减少无效透镜数量，因此能更有效地利用透镜发挥匀光效能。用软件分别仿真了采用近六边形、9×9方形透镜的照明系统，并对比了其照度图，结果表明使用近六边形阵列的照明系统照度更为均匀。用近六边形阵列设计的照明系统与数字微反射镜（DMD）、光刻镜头相结合，进行了2 μm精度的数字光刻实验，其像面照度均匀，线条清晰。

关键词: 均匀照明；复眼透镜阵列；光学设计；365 nm发光二极管；数字光刻

Abstract: In digital lithography illumination system, 365 nm light emitting diode (LED) is designed by using fly's-eye lens. The lens is arranged in a nearly hexagon array structure, which can basically cover the circular light. The nearly hexagon array can reduce the number of invalid lens compared with the traditional square structure, so that the lens can be more effectively used to develop uniform light efficiency. The illumination systems with nearly hexagon array and 9×9 square fly's-eye lens array are simulated respectively by software, and their irradiance maps are compared. Results show that the illumination system with nearly hexagon array is more uniform. The illumination system designed with nearly hexagon array is combined with digital micro mirror device（DMD ）and lithographic lens, and a digital lithography experiment with 2 μm precision is carried out. It’s found that the image surface illumination is uniform and line is clear.

Key words: uniform illumination; fly's-eye lens array; optical design; 365 nm light-emitting diode; digital lithography

中图分类号:

TN305.7

梁庆九周金运. 基于365nmLED的数字光刻照明系统的匀光设计[J]. J4, 2018, 35(2): 225-229.

LIANG Qingjiu, ZHOU Jinyun. Uniform light design of digital lithography illumination system based on 365 nm LED [J]. J4, 2018, 35(2): 225-229.

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