退火温度和退火时间对不同衬底上 Mg2Si 薄膜结构的影响

廖杨芳, 谢泉∗

Effects of annealing temperature and annealing time on structure of Mg2Si films on different substrates

LIAO Yangfang, XIE Quan∗

量子电子学报 . 2022, (4): 644 -650 . DOI: 10.3969/j.issn.1007-5461.2022.04.020