移动焦平面正反面曝光制备 SU-8 微结构及
PDMS 浓度梯度产生器
陈启明, 傅仁轩, 徐勇军, 刘益标, 周金运, 宋显文
Fabrication of SU-8 microstructure and PDMS
concentration gradient generator by moving focal
plane front and back exposure
CHEN Qiming , FU Renxuan , XU Yongjun , LIU Yibiao , ZHOU Jinyun , SONG Xianwen
量子电子学报
.
2023, (3): 415
-422
.
DOI: 10.3969/j.issn.1007-5461.2023.03.014