退火温度对蓝宝石衬底上Mg2Si薄膜质量和光学性质的影响

廖杨芳, 谢泉

Effect of annealing temperature on the quality and optical properties of Mg2Si films on sapphire substrates

LIAO Yangfang , XIE Quan

量子电子学报 . 2023, (4): 492 -499 . DOI: 10.3969/j.issn.1007-5461.2023.04.008