量子电子学报 ›› 2023, Vol. 40 ›› Issue (2): 181-192.doi: 10.3969/j.issn.1007-5461.2023.02.003

• “太赫兹物理、器件与应用”专辑 • 上一篇    下一篇

基于半导体光子学器件的太赫兹成像技术研究进展 (封面文章}

王 长1,2∗ , 宋高辉1,2 , 谭智勇1,2 , 曹俊诚1,2∗   

  1. ( 1 中国科学院上海微系统与信息技术研究所, 太赫兹固态技术重点实验室, 上海 200050; 2 中国科学院大学材料与光电研究中心, 北京 100049 )
  • 收稿日期:2022-09-28 修回日期:2022-11-04 出版日期:2023-03-28 发布日期:2023-03-28
  • 通讯作者: E-mail: cwang@mail.sim.ac.cn; jccao@mail.sim.ac.cn E-mail:E-mail: cwang@mail.sim.ac.cn; jccao@mail.sim.ac.cn
  • 作者简介:王 长 ( 1979 - ), 博士, 研究员, 博士生导师, 主要从事太赫兹器件及成像技术方面的研究。 E-mail: cwang@mail.sim.ac.cn
  • 基金资助:
    国家自然科学基金重大仪器项目和面上项目 (61927813, 61975225), 上海市科学技术委员会科技创新行动计划 (21DZ1101102)

Research progress on terahertz imaging technology based on semiconductor photonics devices

WANG Chang 1,2∗ , SONG Gaohui 1,2 , TAN Zhiyong 1,2 , CAO Juncheng 1,2∗   

  1. ( 1 Key Laboratory of Terahertz Solid State Technology, Shanghai Institute of Microsystems and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; 2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China )
  • Received:2022-09-28 Revised:2022-11-04 Published:2023-03-28 Online:2023-03-28

摘要: 太赫兹成像是太赫兹技术应用的重要方向之一。基于太赫兹(THz)量子级联激光器(QCL)和THz量子阱探测器(QWP)等半导体光子学器件的THz成像系统具有结构紧凑、空间分辨率高、成像信噪比较高等优点,成为当前研究的热点领域。本文主要对国内外关于THz QCL和THz QWP器件在远场和近场成像应用方面的研究进行系统综述,分析了THz成像系统的构成和成像效果,总结了各THz成像系统的性能参数情况,探究了THz成像系统性能提升的途径以及应用前景。

关键词: 激光技术, 成像, 太赫兹, 量子级联激光器, 量子阱探测器

Abstract: Terahertz (THz) imaging is one of the important directions for the application of THz technology. THz imaging systems based on semiconductor photonics devices such as THz quantum cascade lasers (QCLs) and THz quantum well photodetectors (QWPs) have the advantages of compact structure, high spatial resolution, and high imaging signal-to-noise ratio, and have become the research highlights in the related field. In this paper, the research progress of far-field and near-field imaging systems based on THz QCL and THz QWP devices is systematically reviewed, the composition, mechanism, and performance of these THz imaging systems are carefully described, the performance parameters of each kind of imaging system are summarized, the methods to further improve the performance of THz imaging system are proposed and their application prospects are also discussed.

Key words: laser techniques, imaging, terahertz, quantum cascade laser, quantum well photodetector

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