量子电子学报 ›› 2026, Vol. 43 ›› Issue (5): 690-705.doi: 10.3969/j.issn.1007-5461.2026.05.002
YAG晶体元件加工技术研究进展
马荣国 1,2,3, 张庆礼 1,3*, 高进云 1,3, 孙贵华 1,3, 窦仁勤 1,3, 韩松 1,3, 张瑞 1,3, 陈照 1,2,3, 王小飞 1,3, 张德明 1,3, 孙彧 1,3, 刘文鹏 1,3
- 1 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 光子器件与材料安徽省重点实验室, 安徽 合肥 230031; 2 中国科学技术大学, 安徽 合肥 230026; 3 先进激光技术安徽省实验室, 安徽 合肥 230037
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收稿日期:2023-05-18修回日期:2023-06-26出版日期:2026-09-28发布日期:2026-09-30 -
通讯作者:E-mail: zql@aiofm.ac.cn E-mail:zql@aiofm.ac.cn -
作者简介:马荣国 ( 1997 - ), 陕西商洛人, 研究生, 主要从事激光晶体元件超精密加工技术方面的研究。E-mail: marongguo0551@163.com -
基金资助:国家自然科学基金 (52272011), 中国科学院青年创新促进会 (2023463), 安徽省科技重大专项项目 (202203a05020002)
Research progress in YAG crystal element processing technology
MA Rongguo 1,2,3, ZHANG Qingli 1,3*, GAO Jinyun 1,3, SUN Guihua 1,3, DOU Renqin 1,3, HAN Song 1,3, ZHANG Rui 1,3, CHEN Zhao 1,2,3, WANG Xiaofei 1,3, ZHANG Deming 1,3, SUN Yu 1,3, LIU Wenpeng 1,3
- 1 Anhui Provincial Key Laboratory of Photonic Devices and Materials, Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China; 2 University of Science and Technology of China, Hefei 230026, China; 3 Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
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Received:2023-05-18Revised:2023-06-26Published:2026-09-28Online:2026-09-30
摘要： YAG 晶体元件是高功率全固态激光器的核心器件, 其光学加工质量直接影响激光器的性能和寿命。因此, YAG 晶体元件加工方法和工艺研究对于高功率全固态激光器的发展至关重要。本文分析了YAG 晶体元件, 尤其是 板条YAG 晶体元件的加工难点; 介绍了游离磨料研磨和固结磨料研磨两种研磨方法; 针对关键的抛光工艺, 从全局 抛光和局部确定性修形抛光两个方面, 全面概述了几种典型抛光方法的工作原理、研究进展、成果及优缺点; 最后展 望了YAG 晶体元件加工技术的发展趋势。
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引用本文
马荣国, 张庆礼, 高进云, 孙贵华, 窦仁勤, 韩松, 张瑞, 陈照, 王小飞, 张德明, 孙彧, 刘文鹏, . YAG晶体元件加工技术研究进展[J]. 量子电子学报, 2026, 43(5): 690-705.
MA Rongguo , ZHANG Qingli , GAO Jinyun , SUN Guihua , DOU Renqin , HAN Song , ZHANG Rui , CHEN Zhao , WANG Xiaofei , ZHANG Deming , SUN Yu , LIU Wenpeng , . Research progress in YAG crystal element processing technology[J]. Chinese Journal of Quantum Electronics, 2026, 43(5): 690-705.
| [1] Zhou S H, Zhang H, Tang X J. High Power Diode Pumped Solid State Lasers [J]. Chinese Journal of Lasers, 2009, 36(07):1605-1618. 周寿桓, 赵鸿, 唐小军. 高平均功率全固态激光器 [J]. 中国激光, 2009, 36(07):1605-1618.[2] Yao J Q. Introduction to the "All Solid State Lasers" album [J]. Chinese Journal of Quantum Electronics, 2005(04):481. 姚建铨. “全固态激光器”专辑简介 [J]. 量子电子学报, 2005(04):481.[3] Li J M. Research and application of high-power all solid-state laser [J]. Infrared and Laser Engineering, 2007(S1): 1-3.李晋闽. 高功率全固态激光器研究及应用 [J]. 红外与激光工程, 2007(S1): 1-3.[4] Gao Q S, Zhou J T, Shang J L, et al. High efficiency and compact Yb:YAG slab all-solid-state laser at room temperature [J]. High Power Laser and Particle Beams, 2020,32(12):115-119.高清松, 周唐建, 尚建力, 等. 高效紧凑室温Yb:YAG板条全固态激光技术研究 [J]. 强激光与粒子束, 2020,32(12):115-119.[5] Li J M. Development, Trend and Application of High Average Power Diode Pumped Lasers [J]. Laser & Optoelectronics Progress, 2008(07):16-29.李晋闽. 高平均功率全固态激光器发展现状、趋势及应用 [J]. 激光与光电子学进展, 2008(07):16-29.[6] Ma R G, Zhang Q L, Gao J Y, et al. YAG Crystal Lapping Process and Subsurface Damage after Lapping [J]. Journal of the Chinese Ceramic Society, 2023, 51(03):767-774. 马荣国, 张庆礼, 高进云, 等. YAG晶体研磨工艺与研磨后亚表面损伤研究 [J]. 硅酸盐学报, 2023, 51(03):767-774.[7] Zhang G, Jiang B X, Zhang P D, et al. Growth mechanism of YAG single crystal in planar waveguide by solid-state crystal growth method [J]. Ceram Inter, 2018, 44 (15): 18949-18954.[8] Xu S Z, Qiu J R, Li C B, et al. Direct writing waveguides inside YAG crystal by femtosecond laser [J]. Opt Commun, 2009, 282 (24): 4810-4814.[9] Dong J, Shirakawa A, Ueda K I, et al. Efficient laser oscillation of Yb: Y3Al5O12 single crystal grown by temperature gradient technique [J]. Appl Phys Lett, 2006, 88: 161115.[10] Qiu H W, Yang P Z, Dong J, et al. The influence of Yb concentration on laser crystal Yb:YAG [J]. Mater Lett, 2002, 55 (1):1-7.[11] Wang H H, Lin L X, Ye X. Status and development trend of high power slab laser technology [J]. 2020, 49(07): 97-104.王辉华, 林龙信, 叶辛. 高功率板条激光技术现状与发展趋势 [J]. 红外与激光工程, 2020, 49(07): 97–104.[12] Ding D W. The characterization and evaluation of the large size slab laser crystal material performance [D]. Changchun: Changchun University of Science and Technology, 2014.丁大伟. 大尺寸板条激光晶体材料性能的表征和评估 [D]. 长春理工大学, 2014.[13] Zhao S. Study on High Power and High Beam Quality Solid-State Slab Laser [D]. Jinan: Shandong University, 2010.赵爽. 高功率高光束质量全固态板条激光器的研究[D].山东大学,2010.[14] Martin W S, Chernoch J P. Multiple internal reflection face pumped laser:US Patent, 3633126 [P].1972-12-05.[15] Sun F, Peng T C. Structural Design of Zig-Zag Laser Slab [J]. Optics & Optoelectronic Technology, 2012, 10(06):32-35. 孙峰, 彭堂超. Zig-Zag激光板条的结构设计 [J]. 光学与光电技术, 2012, 10(06):32-35.[16] Xie R Q, Liao D F, Wang X B, et al. Fabrication of Nd:YAG crystal slab using composite lap [J]. High Power Laser and Particle Beams, 2014, 26(01):140-143.谢瑞清, 廖德锋, 王晓博, 等. 板条Nd:YAG晶体的合成盘抛光技术 [J]. 强激光与粒子束, 2014, 26(01):140-143.[17] Ming S, Li J, Zhang Y C, et al. Effect of abrasive size and matrix hardness on fixed abrasive polishing of YAG crystal [J]. Diamond Abras Eng, 2020, 40(3): 86–90. 明舜, 李军, 张羽驰, 等. 磨粒尺寸和基体硬度对固结磨料抛光YAG晶体的影响 [J]. 金刚石与磨料磨具工程, 2020, 40(3): 86–90. [18] Sun Z M. Study on Mechanical Lapping and Polishing Process of Yttrium Aluminum Garnet Crystal [D]. Dalian: Dalian University of Technology, 2018.孙志明. 钇铝石榴石晶体的机械研磨抛光工艺研究 [D]. 大连: 大连理工大学,2018.[19] Mckay J, Bai T, Goorsky M S. Chemical Mechanical Polishing and Direct Bonding of YAG [J]. ECS Transactions, 2018, 86(5):217-222.[20] Zou Y, Wu T, Li Z T, et al. Bondability Criterions of Laser Crystals, 2016, 43(10):63-69.邹岩, 吴婷, 李之通, 等. 激光晶体的键合条件研究 [J]. 中国激光, 2016, 43(10):63-69.18[21] Chen X H, Xie R Q, Hou J, et al. Research on Optical Machining Performance of Laser Crystals Based on Nano-indentation Testing. Journal of Synthetic Crystals, 2016, 45(07): 1775-1780.陈贤华, 谢瑞清, 侯晶, 等. 基于纳米压痕测试的激光晶体光学加工性能研究 [J]. 人工晶体学报, 2016, 45(07):1775-1780.[22] Zhang R, Mei D J, Shi X T, et al. Research progress of dislocation of YAG crystal [J]. Chinese Journal of Quantum Electronics, 2022, 39(05): 687-706.张瑞, 梅大江, 石小兔, 等. YAG晶体的位错研究进展 [J]. 量子电子学报, 2022, 39(05): 687-706.[23] Sun X M. The Defects Inspection of Some Oxide Crystals [J]. Piezoelectrics & Acoustooptics, 1982(04): 24-29.孙向明. 几种氧化物晶体的缺陷检测 [J]. 压电与声光, 1982, 4: 24-29.[24] Bi H, Xu X Z, Zhu J H, et al. Reduction of the Stress Birefringence in the Undoped YAG Crystal Grown by the Czochralski Method [J]. Laser & Infrared, 2003, 5:348-350.毕海, 徐学珍, 朱建慧, 等. 提拉法生长非掺杂YAG晶体应力双折射的减小 [J]. 激光与红外, 2003, 5:348-350.[25] Jiang B X, Xu J, Li H J, et al. Core center distribution of Nd:YAG crystal grown by Temperature gradient technique [J]. Acta Physica Sinica, 2007, 2:1014-1019.姜本学, 徐军, 李红军, 等. 温度梯度法生长Nd:YAG激光晶体的核心分布 [J]. 物理学报, 2007, 2:1014-1019.[26] Min N B, Yang Y S. THE GROWTH OF FACETS AND VICINAL INTERFACESON CZOCHRALSKI-GROWN YAG SINGLE CRYSTALS [J]. Acta Physica Sinica, 1979, 3:285-296.闵乃本, 杨永顺. 直拉法YAG的小面生长和邻位面生长 [J]. 物理学报, 1979, 3:285-296.[27] Cao Y H. Shape of the Solid-liquid Interface during CZ Growth of YAG and Doped YAG Crystal [J]. Journal of Synthetic Crystals, 1998, 1:49-53.曹余惠.钇铝石榴石晶体固液界面形状的研究 [J]. 人工晶体学报, 1998, 1:49-53.[28] Zhu J M, Zhao B J, Zhu S F, et al. A new method for directional cutting of crystals [J]. Journal of Sichuan University (Natural Science Edition), 1997, 3: 49–52.朱居木, 赵北君, 朱世富, 等. 一种新的晶体定向切割方法 [J]. 四川大学学报(自然科学版), 1997(03):49-52.[29] Lu D Z, Zhu S F, Zhao B J, et al. Study of Directional Cutting Method on CdSe Crystal [J]. Journal of Synthetic Crystals, 2008, 5: 1121-1126.卢大洲, 朱世富, 赵北君, 等. 硒化镉晶体定向切割方法研究 [J]. 人工晶体学报, 2008, 5: 1121–1126.[30] Zhang Y L. The Directional Methods in Optical Crystal Processing [J]. Journal of Changchun University of Science and Technology(Natural Science Edition), 1991, 2:29-33.张玉兰. 光学晶体加工中的定向方法 [J]. 长春光学精密机械学院学报, 1991, 2:29-33.[31] Li Z X. Study on Wire Sawing Technology of Semiconductor Crystal [J]. Infrared, 2019, 40(11):29-34.李振兴. 半导体晶体线锯切割工艺研究 [J]. 红外, 2019, 40(11):29-34.[32] Peng S B, Chen C. Study of Failure Mechanism of Electroplated Diamond Wire When Cutting YAG Crystal [J]. Superhard Material Engineering, 2015, 27(05):13-17.彭少波, 陈超. 电镀金刚石线切割YAG晶体的失效机理研究 [J]. 超硬材料工程, 2015, 27(05):13-17.[33] Feng Y Y, Zhao H Y, Xu S D, et al. Experimental study of Nd:YAG crystalline high-precision cutting [J] Manufacturing Technology & Machine Tool, 2017(06):152-156.冯嫄嫄, 赵惠英, 徐世栋, 等. Nd:YAG晶体高精度切割加工试验研究 [J]. 制造技术与机床, 2017(06):152-156.[34] Liu W T. Study on the cutting technology of endless diamond wire saw [D]. Zhengzhou: Zhongyuan Univcrsity of Technology, 2018.刘文涛. 环形金刚石线锯切割工艺研究 [D]. 中原工学院, 2018.[35] Wang Z, Wu L Y, Dai Y F, et al. Rapid detection of subsurface damage of optical materials in lapping process and its influence regularity [J]. Optics and Precision Engineering, 2008(01): 16-21.王卓, 吴宇列, 戴一帆, 等. 光学材料研磨亚表面损伤的快速检测及其影响规律 [J]. 光学精密工程, 2008(01): 16-21.[36] Wan L L, Dai P, Liu Z J, et al. Research progress in ultra?precision lapping process of sapphire [J]. Ordnance Material Science and Engineering, 2018, 41(01): 115-123. 万林林, 戴鹏, 刘志坚, 等. 蓝宝石超精密研磨加工研究进展 [J]. 兵器材料科学与工程, 2018, 41(01): 115-123.[37] Teng L, Song S Z, Ren J X. Ultra-precision preparing technology of extension wafer of yttrium aluminum gar-net (YAG) and gadolinium gallium garnet ( GGG) [J]. China Mechanical Engineering，1997, 5:86-87.滕霖, 宋绍忠, 任敬心．钇铝石榴石(YAG)和钆镓石榴石(GGG)外延衬底的超精密制备技术 [J].中国机械工程，1997, 5:86-87.[38] Li J, Zhu Y W, Zuo D W, et al. ULTRA-PRECISION MACHINING OF TRANSPARENT Nd:Nd:Y_3Al_5O_(12) CERAMICS [J]. Journal of the Chinese Ceramic Society, 2008, (8): 1178-1182. 李军, 朱永伟, 左敦稳, 等. Nd:Y_3Al_5O_(12)透明陶瓷的超精密加工 [J]. 硅酸盐学报, 2008, (8): 1178-1182. [39] Guo J T. Decision of Processing Parameters of Softand Brittle Materials in Fixed Abrasive Lapping Process [D]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2021.郭继通. 固结磨料研磨软脆材料工艺决策研究 [D]. 南京航空航天大学,2021.[40] An R L. Study on Fixed-abrasive Lapping and Chemically Mechanical Polishing of Yttrium Aluminum Garnet Crystal [D]. Dalian: Dalian University of Technology, 2018. 安润莉. YAG晶体的固结磨料研磨与化学机械抛光工艺研究 [D]. 大连理工大学,2018.[41] Song C P. Study on Precision Grinding and Polishing Proce Polycrystalline YAG [D]. Dalian: Dalian University of Technology, 2021. 宋传平. 多晶YAG陶瓷精密研磨抛光工艺研究[D].大连理工大学,2021.[42] Ming S. Research on Fixed Abrasive Lapping and Polishing of Ultra Thin Laser Crystal [D]. Nanjing:Nanjing University of Aeronautics and Astronautics, 2020.明舜. 超薄激光晶体固结磨料研磨抛光研究 [D]. 南京航空航天大学,2020.[43] Yin X. Research on Continuous Polishing Technology [D]. Chengdu: University of Electronic Science and Technology of China, 2007. 阴旭. 环形抛光技术研究 [D]. 电子科技大学, 2007.[44] Wang Z J. Practical Optical Technology Manual(in Chinese). Beijing: China Machine Press, 2006:579–582. 王之江. 实用光学技术手册 [M]. 北京: 机械工业出版社, 2006: 579–582.[45] Wang Y K. High efficient grinding and polishing becomes a hot research topic of optical parts [D]. Xi 'an: Xi 'an Polytechnic University, 2012. 王元康. 光学零件高效加工工艺研究[D]. 西安工业大学, 2012.[46] Shen J. Study and experiment on Ultraprecision Polishing of Optical Crystal Materials [D]. Changchun：Changchun University of Science and Technology, 2004. 沈俊. 光学晶体材料超精密抛光机理及加工工艺的研究 [D]. 长春理工大学, 2004.[47] Wang S W, Yao H B, Jiang J B. Review of the Development of the Ultra-Smooth Surfaces Processing Technology [J]. Aeronautical Precision Manufacturing Technology, 2007(02): 18-20. 王松伟, 姚合宝, 蒋军彪. 一种新型古典抛光工艺的技术研究[J]. 航空精密制造技术, 2007(02): 18-20.[48] Zhao X X, Ou Z W, Mo J C, et al. Review of the Development of the Ultra-Smooth Surfaces Processing Technology [C]. Proceedings of 2011 China Functional Materials Technology and Industry Forum (Vol. 3). Scientific Research Publishing, USA, 2011:324–327.赵栩欣, 欧忠文, 莫金川, 等. 超光滑表面加工技术进展评述 [C]. 2011中国功能材料科技与产业高层论坛论文集（第三卷. 美国科研出版社(Scientific Research Publishing, USA), 2011:324-327.[49] Ma Z L, Liu J, Wang J L. Development and Application of Ultra-Smooth Optical Surface Polishing Technology [J]. Laser & Optoelectronics Progress, 2011(8):71-77. 马占龙, 刘健, 王君林. 超光滑光学表面加工技术发展及应用 [J]. 激光与光电子学进展, 2011(8): 71-77.[50] Zhang Y, Xu Q L, Chen M, et al. Experimental study of the influence of slurry particle size on material removal consequent in bow-feed polishing [J]. Optical Technique, 2014,40(06): 486-491. 张杨, 徐清兰, 陈梅, 等. 浴法抛光中抛光粉粒径对去除效果影响的试验研究 [J]. 光学技术, 2014, 40(06): 486–491.[51] Xie H D, Wang X Q, Shen G Q. Superpolishing of Crystals [J]. Journal of Artificial Crystals, 2004(06): 1035-1040. 谢会东, 王晓青, 沈光球. 晶体的超精密抛光 [J]. 人工晶体学报, 2004(06): 1035-1040.[52] Shen Z, Ma B, Wang Z, et al. Fabrication of flat and supersmooth surfaces with bowl-feed polishingProcess-art. no. 67220U [J]. Proceedings of SPIE-The International Society for Optical Engineering,2007, 6722: 67220U-67220U-7.[53] Dietz R W, Bennett J M. Bowl feed technique for producing supersmooth optical surfaces [J]. Appl. Opt. 1966, 5(5): 881- 882.[54] Wingerden V , Johannes. Production and measurement of superpolished surfaces[J]. Optical Engineering, 1992, 31(5):1086-1092.[55] Namba Y, Tsuwa H. Ultra finishing of Sapphire single crystal [J]. Annals of the CIRP, 1977, 26:325–329.[56] Chi X, Fang J G, Suo X H, et al. Application of ?oat polishing in lapping of metal nanometer surface[J]. Aviation Precision Manufacturing Technology, 2009, 45(2): 12-14. 池宪, 房建国, 锁小红, 等. 浮法抛光在金属纳米级超光滑表面加工中的应用 [J]. 航空精密制造技术, 2009, 45(2): 12–14.[57] Peng Y F, Yang L, Liu X Y. Polishing process and progress of calcium fluoride [J]. Aeronautical Manufacturing Technology, 2022, 65(13): 14-25. 彭云峰 , 杨磊 , 刘晓阳. 氟化钙抛光加工工艺及进展 [J]. 航空制造技术 , 2022, 65(13): 14-25.[58] Hou D H, Luo Z, Wang Y G, et al. New development of ultra-smooth surface polishing technology[J]. Aerodynamic Missile Journal, 2011(05): 80-84+89. 侯德海, 罗征, 王永刚, 等. 超光滑表面抛光技术的新进展 [J]. 飞航导弹, 2011(05): 80-84+89.[59] Zhu C R, Ren Y F. Ultra-Smooth Surface Polishing Techniques of Sapphire Substrates [J]. Mechanical Engineer, 2009(11):16-18. 朱从容, 任尹飞. 蓝宝石基片的超光滑表面抛光技术 [J]. 机械工程师, 2009(11):16-18.[60] Gao H G, Cao J L, Chen B, et al. Principle device and preliminary experiment of float polishing[J]. Optics and Precision Engineering, 1995(01): 57-60. 高宏刚, 曹健林, 陈斌, 等. 浮法抛光原理装置及初步实验 [J]. 光学精密工程, 1995(01): 57–60.[61] Gao H G, Cao J L, Chen B. Float polishing for supersmooth surfaces [J]. Optical Technique, 1995(03): 40-43. 高宏刚, 曹健林, 陈斌. 浮法抛光超光滑表面加工技术 [J]. 光学技术, 1995(03): 40-43.[62] Namba Y, Tsuwa H. Ultraprecision float polishing machine [C]. Annals of the CIRP. (1987)36, 211.[63] Weis O. Direct contact superpolishing of sapphire[J]. Appl. Opt. 22, (1992) 4355.[64] Namba Y, Ohnishi N, Yoshidas, et al. Ultra-precision float polishing of calcium fluoride single crystals for deep ultra violet applications [C]. CIRP Annals, 2004, 53(1): 459- 462.[65] Leistner A. Progress report on teflon polishers for precision optical flats [J]. Appl. Opt., 1972, 11(4): 960–961.[66] De K. Production and use of polytetrafluoroethylene polishing discs [J]. Opto-Electronic Engineering. 1977(01): 47–54. 德开. 聚四氟乙烯抛光盘的制作和使用 [J]. 光学工程, 1977(01): 47–54.[67] Leistner A. Teflon Polisher: the Manufacture and Use [J]. Appl. Opt., 1976, 15(2): 293–298.[68] Leistner A, Thwaite E G, Lesha F, et al. Polishing study using teflon and pitch laps to produce flat and supersmooth surfaces [J]. Appl. Opt., 1992, 31(10): 1472–1482.[69] Cheng Z P. Study on Water Dissolution Ultra-precision Continuous Polishingof I arge Sized KDP [D]. Dalian: Dalian University of Technology, 2020. 程志鹏. 大尺寸KDP水溶解超精密环形抛光方法研究 [D]. 大连理工大学, 2020.[70] Liu X S. Study of online surface shape monitoring technology for ring polishing [D]. Nanjing: Nanjing University of Science & Technology, 2014. 刘小颂. 环形抛光在线面形监测技术的研究 [D]. 南京理工大学, 2014.[71] Ma Z C. The Study on The Methods of Fabricating A Iarge Aperture Flat [D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2010. 马志成. 大口径平面光学元件加工的工艺方法研究 [D]. 中国科学院研究生院（长春光学精密机械与物理研究所）, 2010.[72] Xie L, Ma P, Liu Y B, et al. Continuous polishing process for large diameter reflective elements [J]. High Power Laser and Particle Beams, 2012, 24(07): 1687–1690.谢磊, 马平, 刘义彬, 等. 大口径反射元件环形抛光工艺 [J]. 强激光与粒子束, 2012, 24(07): 1687–1690.[73] Shanghai Institute of Optics and Fine Mechanics makes important progress in neodymium glass continuous polishing process [J]. Rare Earth Information, 2007(12): 17. 上海光机所钕玻璃环抛工艺取得重要进展 [J]. 稀土信息, 2007(12): 17.[74] Herzog A H, Walsh R J. Process for polishing semiconductor materials: US, US 3170273 A [P]. 1965.[75] Li J. Studies on the Key Technologies in Ultra-precision Machining of Hard Brittle Materials [D]. Beijing: Graduate University of Chinese Academy of Sciences(Technical Institute of Physics and Chemistry, Chinese Academy of Sciences), 2007.李军. 硬脆材料超精密加工关键技术研究 [D]. 中国科学院研究生院（理化技术研究所）, 2007.[76] Zhang Z L, Jin S J, Mu Q, et al. Optimization of CMP solution for yttrium aluminum garnet crystal [J]. Diamond & Abrasives Engineering, 2021,41(02):82-88.张自力,金洙吉,慕卿, 等. 钇铝石榴石晶体化学机械抛光液成分优化研究 [J]. 金刚石与磨料磨具工程, 2021,41(02):82-88.[77] Chu X F, Tang L J, Dong Y P, et al. Application of chemical mechanical polishing in the processing of optical crystals [J]. Diamond & Abrasives Engineering, 2012, 32(01):23-28+33.储向峰, 汤丽娟, 董永平, 等. 化学机械抛光在光学晶体加工中的应用 [J]. 金刚石与磨料磨具工程, 2012, 32(01):23-28+33.[78] Liu Q L. Optimization of polishing path and material removal based on CCOS [D]. Changchun: Jinlin University, 2022. 刘青龙. 基于CCOS的抛光轨迹及材料去除优化研究 [D]. 吉林大学, 2022.[79] Liu W L. Theoretical Research on Disc Hydrodynamic Polishing Based on CCOS (Computer Controlled Optical Surfacing) [D]. Tianjin: Tianjin University, 2014. 刘文龙. 基于CCOS技术的盘式动压抛光工艺理论研究 [D]. 天津大学, 2014.[80] Chen Y C. Research on the Improvement of Optical Mirror Processing Based on CCOS principle [D]. Nanjing: Nanjing University of Science & Technology, 2020. 陈永超. 基于CCOS原理的光学镜面加工工艺改良研究 [D]. 南京理工大学, 2020.[81] Yang Z. Study on specification and analysis of frequency band errors in Deterministic Optical Machining [D]. Changsha: National University of Defense Technology, 2008.杨智. 确定性光学加工频带误差的评价与分析方法研究 [D]. 国防科学技术大学, 2008.[82] Liu M C, Shen Y H, Hu X Y, et al. Research of fabricating plane optical components with computer-cont rolled optical polishing [J]. Optical Technique, 2000(01): 59–61+65. 刘民才, 申艳辉, 胡晓阳, 等. 平面元件数控加工技术研究 [J]. 光学技术, 2000(01): 59–61+65.[83] Wang Q J. Research on Fixed Abrasive Elastic Machining for Optical Components [D]. Xiamen: Xiamen University, 2017. 王泉金. 光学元件固结磨料弹性加工技术研究 [D]. 厦门大学, 2017.[84] Meinel A B, Bashkin S, Loomis D A. Controlled figuring of optical surfaces by energetic ionic beams [J]. Applied Optics, 1965, 4(12): 1674.[85] Dai Y F, Zhou L, Xie X H, et al. Ion beam figuring technology [J]. Journal of Applied Optics, 2011, 32(04): 753-760+805. 戴一帆, 周林, 解旭辉, 等. 离子束修形技术 [J]. 应用光学, 2011, 32(04): 753–760+805.[86] Zhou L. Study on Theory and Technology in Ion Beam Figuring for Optical Surfaces [D]. Changsha: National University of Defense Technology, 2008. 周林. 光学镜面离子束修形理论与工艺研究 [D]. 国防科学技术大学, 2008.[87] Dai Y F, Zhou L, Xie X Hi, et al. Determi nistic Figuring in Optical Machini ng by Ion Beam [J]. Acta Optica Sinica, 2008(06): 1131–1135.戴一帆, 周林, 解旭辉, 等. 应用离子束进行光学镜面确定性修形的实现[J].光学学报, 2008(06): 1131–1135.[88] Uzawa S. Canon's development status of EUVL technologies [R]. The 4th EUVL symposium: Canon Inc., 2005.[89] Zhou L, Xie X H, Dai Y F, et al. Realization of Velocity Mode in Flat Optics Machining Using Ion Beam [J]. Journal of Mechanical Engineering, 2009, 45(07): 152–156. 周林, 解旭辉, 戴一帆, 等.光学平面镜面离子束修形中速度模式的实现 [J]. 机械工程学报, 2009, 45(07):152-156.[90] Zhang F. Fabrication of optical flat mirror with nanometer surface error [J]. Chinese Optics, 2014, 7(04): 616-621. 张峰. 纳米级面形精度光学平面镜加工 [J]. 中国光学, 2014, 7(04): 616-621.[91] Peng X Q. A Dissertation Submitted to National University of Defense Technology for the Degree of Philosophy Doctor in Engineering [D]. Changsha: National University of Defense Technology, 2004. 彭小强. 确定性磁流变抛光的关键技术研究 [D]. 国防科学技术大学, 2004.[92] Yang X L, Su J. Progress of Magnetorheological Finishing [J]. Journal of Wuhan University of Technology, 2010, 32(24): 136-139. 杨雪玲, 苏君. 磁流变抛光技术现状与进展 [J]. 武汉理工大学学报, 2010, 32(24): 136-139.[93] Xiao Q, Wang J Q, Jin L P. Research Progress of Key Technology and Process of Magnetorheological Finishing [J]. Materials Reports, 2022,36(07) :65-74. 肖强, 王嘉琪, 靳龙平. 磁流变抛光关键技术及工艺研究进展 [J]. 材料导报, 2022,36(07) :65–74.[94] Zhang F. Study on Technique of Magnetorheological Finishing [D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2000. 张峰. 磁流变抛光技术的研究 [D]. 中国科学院长春光学精密机械与物理研究所, 2000.[95] Pan J S, Yan Q S, Lu J B, et al. Cluster Magnetorheological Effect Plane Polishing Technology [J]. Journal of Mechanical Engineering, 2014, 50(01): 205-212. 潘继生, 阎秋生, 路家斌, 等. 集群磁流变平面抛光加工技术 [J]. 机械工程学报, 2014, 50(01): 205–212.[96] Sha S J, Hu J F, Zhang H Q. New Progress of Magnetorheological Finishing [J]. Mechanical Engineer, 2018(07): 5-8. 沙树静, 胡锦飞, 张和权. 磁流变抛光技术发展 [J]. 机械工程师, 2018(07): 5–8.[97] Luo H. Study on Damage Generation Mechanism and Process of Planar Magnetorheological Finishing Using Large Polishig Tool [D]. Changsha: Hunan University, 2009. 罗虎. 大抛光模平面磁流变抛光损伤机理及工艺研究 [D]. 湖南大学, 2019.[98] He J G. Magnetorheological polishing technology and equipment research [C]. Annual Report on Science and Technology of Chinese Academy of Engineering Physics (2009 Edition), 2010: 78–79. 何建国. 磁流变抛光技术与装备研究 [C]. 中国工程物理研究院科技年报(2009年版), 2010: 78–79.[99] Dai Y F, Shi F, Peng X Q, et al. Deterministic Figuring in Optical Machining by Magnetorheological Finishing [J]. Acta Optica Sinica, 2010, 30(01): 198–205. 戴一帆, 石峰, 彭小强, 等. 光学镜面磁流变确定性修形的实现 [J]. 光学学报, 2010, 30(01): 198–205. |
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