关键词: 激光物理, 均束器, 激光投影成像光刻, XeF准分子激光, 印刷电路板, 加工窗

Abstract:

For 351nm XeF excimer, by ourselves an illumination system for PCB laser projection image used for high resolution, high throughput, large area and conventional photoresists exposure is designed. On the basis of the theory model of the excimer’s Partly Coherent Flat-top Gaussian Beam (PCFGB ), the diffractive characteristic of micro-lens array （MLA）homogenizer is theoretically analyzed. The uniformity of MLA homogenizer influenced by the diffractive effect is quantitatively analyzed by means of distribution of PCFGB, diffractive angles of constant intensity and Fresnel-Kirchhoff diffractive integral formula. The theoretical calculation indicates that the amplitude is modulated not only by Fresnel diffraction at the microlenses edges but also by multiple beam interference and it is just obvious that the spikes produced by diffraction emerge in the beam edges. Meanwhile, for the PCFGB curves obtained by numerical integral, it is found that 9×9 MLA homogenizer can ensure the overlapping uniformity of the beams from individual microlenses and decrease to a great extent the effect of the diffraction and multiple beam interference. By way of using a hexagonal diaphragm, the spikes at the beam edges produced by diffraction can be cut down and the large-area seamless scanning lithography met. Using ZEMAX optical design software to simulate the effect, it shows that the process window is less than ±2%。

Key words: laser physics, beam homogenizerv, laser projection imaging lithography, XeF excimer, printed circuit boards, process window