Nd:YAG激光晶体开裂与缺陷研究

J4 ›› 2010, Vol. 27 ›› Issue (3): 270-275.

Nd:YAG激光晶体开裂与缺陷研究

权纪亮¹,谢致薇¹,杨元政¹,刘了²,武南平²

1.广东工业大学材料与能源学院，广州510006;
2.广州半导体材料研究所，广州510160

出版日期:2010-05-28 发布日期:2010-05-11

Study on the cracking and defects of Nd:YAG laser crystal

QUAN Ji-liang¹,XIE Zhi-wei¹,YANG Yuan-zheng¹,LI U Liao², WU Nan-ping²

1. Guangdong University of Technology, Guangzhou 510006, China;
2.Guangzhou Semiconductor Material Academy, Guangzhou 510616, China

Published:2010-05-28 Online:2010-05-11

摘要/Abstract

摘要：

采用提拉法沿<111>方向生长Nd:YAG激光晶体时，经常会发生开裂现象。利用光学显微镜、扫描电镜(SEM)和X射线衍射仪、等手段，对开裂Nd:YAG晶体的缺陷特征进行研究。开裂Nd:YAG晶体中有很多不规则包裹物，包裹物内元素含量偏离正常成份；位错密度较高并有塞积现象，位错腐蚀坑中有微裂纹产生；分析表明晶体开裂是由晶体生长后期的降温不均及生长速率的改变加剧了组分过冷带来的不良后果，产生包裹体造成局部应力集中所致。

关键词: Nd:YAG晶体∣晶体开裂∣微裂纹∣晶格畸变

Abstract:

Cracking in Nd:YAG laser crystals grown along <111> by Czochralski method is often observed. The growth defects in the cracked Nd:YAG crystal were studied with optical microscopy, scanning electron microscope(SEM), X-ray diffractometry and optical absorption method. There are a lot of inclusions in cracked crystal, whose composition deviates from the normal composition of crystal. The dislocation density is so high that the phenomenon of pile-up occurs. Some micro-cracks has been observed in dislocations etch pit. Cracking results from stress concentration caused by inclusions, which is caused by components overcooling , fluctuating of growth rate and asymmetry of temperature gradient in later period of crystal growth .

Key words: Nd：YAG crystal∣cracking∣micro crack∣lattice distortion

权纪亮,谢致薇,杨元政,刘了,武南平. Nd:YAG激光晶体开裂与缺陷研究[J]. J4, 2010, 27(3): 270-275.

QUAN Ji-liang,XIE Zhi-wei,YANG Yuan-zheng, LI U Liao, WU Nan-ping2. Study on the cracking and defects of Nd:YAG laser crystal[J]. J4, 2010, 27(3): 270-275.