J4 ›› 2012, Vol. 29 ›› Issue (5): 536-541.

• 激光技术与器件 • 上一篇    下一篇

固体硅激光热效应的二维随机模拟

龚艳春, 武文远, 黄雁华   

  1. 解放军理工大学理学院, 江苏 南京 211101
  • 收稿日期:2011-11-01 修回日期:2011-12-26 出版日期:2012-09-28 发布日期:2012-09-02
  • 通讯作者: 龚艳春(1970-),女,江苏连云港人,副教授,主要从事激光与物质相互作用研究。 E-mail:wuwenyuan12@sohu.com
  • 基金资助:

    解放军理工大学预研基金资助项目(20110503)

2D stochastic simulation of thermal effect about laser–silicon interaction

GONG Yan-chun WU Wen-yuan HUANG Yan-hua   

  1. Colledge of Science, PLA University of Science and Technology , Nanjing 211101, China
  • Received:2011-11-01 Revised:2011-12-26 Published:2012-09-28 Online:2012-09-02

摘要:

热传导方程的复杂性给研究激光热损伤等问题带来了困难,随机模拟算法将热传输看成随机的化学动力学过程,该算法容易实现,能适用于复杂系统随时间变化的模拟。本文基于随机模拟算法,模拟计算了光斑半径为5?m,波长为647nm的高斯激光辐照下硅表面层的二维热传输过程,探讨了硅反射系数、吸收系数、热容和热导率等热物理参数随温度的变化对温度场分布的影响。结果表明,随机模拟算法的结果是合理的,在硅熔点范围内,反射系数和热容可以取其平均值进行计算,有利于提高算法效率。

关键词: 激光物理, 激光辐照, 热效应, 温度分布, 随机模拟,

Abstract:

The complexity of the heat exchange equation brings difficulties to study laser-damage etc. A kind of stochastic method which treats the energy input and redistribution process as a kinetics problem is used,and the thermal physical model is established. Based on stochastic method, the 2D distribution of temperature is studied by Gauss beam with 5?m radius and 647nm wave length. The relationship of the temperature with irradiated time is obtained, and the effects on distribution of temperature are discussed about the variety of reflectance, absorption coefficient, thermal capacity and thermal conductance with temperature. The results indicates that stochastic method is reasonable to treat heat exchange, and the average of reflectance and thermal capacity can be used to improve simulating efficiency under the melting point of silicon.

Key words: laser physics, laser irradiation, thermal effect, temperature distribution, stochastic simulation, silicon

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