非球面面形精细重构方法研究

J4 ›› 2016, Vol. 33 ›› Issue (1): 1-7.

• 基础光学 • 下一篇

非球面面形精细重构方法研究

杨珂,傅东明,张金平,郑列华

中国科学院上海技术物理研究所

收稿日期:2014-12-24 修回日期:2015-02-02 出版日期:2016-01-28 发布日期:2016-01-06
通讯作者: 杨珂(1987-),女，安徽蚌埠人，硕士，主要从事光学加工与检测工作。 E-mail:yangke8710@163.com
基金资助:
国家重点基础研究发展计划（2011CB013206）

Wavefront reconstruction of aspherical surface

YANG Ke, FU Dongming, ZHANG Jinping, ZHENG Liehua

Shanghai Institute of Technical Physics, Chinese Academy of Sciences. Shanghai 200083, China

Received:2014-12-24 Revised:2015-02-02 Published:2016-01-28 Online:2016-01-06

摘要/Abstract

摘要：

针对非球面反射镜在抛光初期干涉仪不能全口径检测面形误差的问题，提出一种三坐标测量机（CMM）和数字干涉仪组合测量以实现全口径波前复原的方法。将CMM与干涉仪测量数据组合，即面形误差以干涉测量为主，干涉检测不能复原的局部波前采用CMM测量数据进行精细重构，从而获得可用于数字化加工的全口径面形误差，并最终达到非球面镜全口径干涉检测。采用该方法对一Ф540mm离轴非球面反射镜在精磨后期进行数据组合补偿，成功实现了反射镜从精磨阶段到抛光阶段的全口径波前检测，从而证明了该方法对实现非球面镜全口径检测有效可行。

关键词: 光学检测波前复原三坐标测量机离轴非球面

Abstract:

In order to realize wavefront reconstruction over full aperture of aspheric surface at the beginning of polishing, a novel method combing coordinate measuring machine (CMM) and digital interferometer is proposed. The main part of surface is able to be measured by interferometer. The rest part, wavefront of which cannot be recovered by interferometer, could be measured by CMM. By combing the data from CMM and interferometer, the error of surface can be reconstructed and the wavefront over full aperture can be obtained ultimately. In our testing, wavefront of an off-axis aspheric surface with 540mm diameter was successfully reconstructed over full aperture during the process from grinding to polishing. The availability of the method for wavefront reconstruction of aspheric surface is proved by the results.

Key words: optical detection, wavefront reconstruction,coordinate measuring machining, off-axis asphere

中图分类号:

O435

杨珂傅东明张金平郑列华. 非球面面形精细重构方法研究[J]. J4, 2016, 33(1): 1-7.

YANG Ke, FU Dongming, ZHANG Jinping, ZHENG Liehua. Wavefront reconstruction of aspherical surface[J]. J4, 2016, 33(1): 1-7.

参考文献

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非球面面形精细重构方法研究

Wavefront reconstruction of aspherical surface

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