径向偏振光对微纳尺度聚合物结构纵向分辨率的改善

J4 ›› 2017, Vol. 34 ›› Issue (1): 76-80.

径向偏振光对微纳尺度聚合物结构纵向分辨率的改善

林乐¹,郑美玲¹,董贤子¹,金峰¹,张永亮¹,赵震声¹,段宣明²

1 中国科学院理化技术研究所，北京 100190； 2 中国科学院重庆绿色智能技术研究院，重庆400714； 3 中国科学院大学，北京100190

收稿日期:2015-10-19 修回日期:2015-11-27 出版日期:2017-01-28 发布日期:2017-01-28
作者简介:林乐（1987- ），福建人，博士生，研究方向为飞秒激光微纳加工。E-mail：linle10@mail.ipc.ac.cn
基金资助:
Supported by National Natural Science Foundation of China(国家自然科学基金，91323301，61275171，91123032，61275048，61205194)，National Nano Major Research Project of Ministry of Science and Technology of China（科技部国家纳米重大研究计划，2010CB934100)

Improvement of longitudinal resolution of micro/nano scale polymer structure with radially polarized beam

LIN Le1, 3, ZHENG Meiling1, DONG Xianzi1, JIN Feng1, ZHANG Yongliang1,ZHAO Zhensheng1, DUAN Xuanming1, 2

1 Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China; 2 Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400174, China; 3 Graduate University of Chinese Academy of Sciences, Beijing 100190, China

Received:2015-10-19 Revised:2015-11-27 Published:2017-01-28 Online:2017-01-28

摘要/Abstract

摘要： 研究了径向偏振型飞秒脉冲激光并将其引入基于双光子吸收理论的微纳加工系统，得到了更高纵向分辨率、更低长径比的二维微纳尺度聚合物结构。对聚焦光场内光强分布的理论模拟表明：径向偏振型飞秒脉冲激光在提高纵向分辨率的同时会在一定程度上降低聚合物结构的横向分辨率，使聚合物结构的长径比降低。用扫描电子显微镜表征聚合物结构得到的结果与理论模拟结果具有良好的一致性。结果表明径向偏振型飞秒脉冲激光提高了微纳尺度聚合物结构的纵向分辨率，在激光光刻领域有良好的应用前景。

关键词: 非线性光学；纵向分辨率；双光子加工；径向偏振；微纳聚合物结构

Abstract: The radially polarized femtosecond pulse laser is investigated and introduced into the micro/nano processing system which is based on two-photon absorption theory. The two-dimension micro/nano polymer structure with higher longitudinal resolution and lower aspect ratio is obtained. Theoretical simulation of intensity distribution within focal light field indicates that the radially polarized femtosecond pulse laser can reduce the lateral resolution of polymer structure to a certain extent while improving the longitudinal resolution, which reduces the aspect ratio of the polymer structure. The results obtained by characterizing the polymer structure with the scanning electron microscopy are in good agreement with the theoretical simulation results. Results show that the radially polarized femtosecond laser can improve the longitudinal resolution of micro/nano scale polymer structure. It has good application prospects in the field of laser lithography.

Key words: nonlinear optics; longitudinal resolution; two-photon fabrication; radial polarization; micro/nano polymer structure

林乐郑美玲董贤子金峰张永亮赵震声段宣明. 径向偏振光对微纳尺度聚合物结构纵向分辨率的改善[J]. J4, 2017, 34(1): 76-80.

参考文献

[1] 董贤子, 陈卫强, 赵震声, et al. 飞秒脉冲激光双光子微纳加工技术及其应用 [J]. 科学通报, 2008, 53 (1): 2-13.
[2] Kawata S, Sun H-B, Tanaka T, et al. Finer features for functional microdevices [J]. Nature, 2001, 412 (6848): 697-698.
[3] Campo A D, Greiner C. SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography [J]. Journal of Micromechanics and Microengineering, 2007, 17 (6): 81-95.
[4] Lorenz H, Despont M, Fahrni N, et al. High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS [J]. Sensors and Actuators A: Physical, 1998, 64 (1): 33-39.
[5] Becker E W, Ehrfeld W, Hagmann P, et al. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) [J]. Microelectronic Engineering, 1986, 4 (1): 35-56.
[6] Lee C H, Chang T W, Lee K L, et al. Fabricating high-aspect-ratio sub-diffraction-limit structures on silicon with two-photon photopolymerization and reactive ion etching [J]. Applied Physics A, 2004, 79 (8): 2027-2031.
[7] Xing J F, Dong X Z, Chen W Q, et al. Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency [J]. Applied Physics Letters, 2007, 90 (13): 131106-131106-3.
[8] Dong X Z, Zhao Z S, Duan X M. Improving spatial resolution and reducing aspect ratio in multiphoton polymerization nanofabrication [J]. Applied Physics Letters, 2008, 92 (9): 091113-091113-3.
[9] Quabis S, Dorn R, Eberler M, et al. Focusing light to a tighter spot [J]. Optics Communications, 2000, 179 (1-6): 1-7.
[10] Dorn R, Quabis S, Leuchs G. Sharper focus for a radially polarized light beam [J]. Physics Review Letters, 2003, 91(23): 233901-233901-4.
[11] Varghese B, Verhagen R, Hussain A, et al. Quantitative assessment of birefringent skin structures in scattered light confocal imaging using radially polarized light [J]. Sensors, 2013, 13 (9): 12527-12535.
[12] Kim W C, Park N C, Yoon Y J, et al. Investigation of near-field imaging characteristics of radial polarization for application to optical data storage [J]. Optical Review, 2007, 14 (4): 236-242.
[13] Zhan Q W. Trapping metallic Rayleigh particles with radial polarization [J]. Optics Express, 2004, 12 (15): 3377-3382.
[14] T?r?k P, Varga P, Laczik Z, et al. Electromagnetic diffraction of light focused through a planar interface between materials of mismatched refractive indices: an integral representation [J]. Journal of the Optical Society of American A, 1995, 12 (2): 325-332.
[15] Hao B, Leger J. Experimental measurement of longitudinal component in the vicinity of focused radially polarized beam [J]. Optics Express, 2007, 15 (6): 3550-3556.