基于后焦面成像的
聚合物平面波导光学参数测量仪

J4 ›› 2017, Vol. 34 ›› Issue (3): 374-378.

基于后焦面成像的聚合物平面波导光学参数测量仪

施矾,朱良富,邱冬,张斗国

中国科学技术大学光学与光学工程系，安徽省光电子科学与技术重点实验室，安徽合肥230026

收稿日期:2016-02-25 修回日期:2016-04-08 出版日期:2017-05-28 发布日期:2017-05-22
通讯作者: 张斗国（1980-），博士，副教授，从事微纳光学的相关研究。 E-mail: DouguoZhang@ustc.edu.cn
作者简介:施矾（1991-），研究生，从事光学传感相关研究。 E-mail: sf910810@mail.ustc.edu.cn
基金资助:
Supported by National Natural Science Foundation of China（国家自然科学基金,11374286，61427818）, National Key Basic Research Program of China ( 国家科技部973项目, 2013CBA01703），Science and Technological Fund of Anhui Province for Outstanding Youth( 安徽省杰青青年科学基金, 1608085J02）

Polymer planar waveguide parameter measuring instrument based on back focal plane imaging

Key Laboratory of Optoelectronic Science and Technology of Anhui Province，Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026， China

Received:2016-02-25 Revised:2016-04-08 Published:2017-05-28 Online:2017-05-22

摘要/Abstract

摘要： 基于后焦面成像确定波导传播特性的基本原理，结合平面波导中的菲涅尔反射理论，设计了一种聚合物平面波导光学参数测量仪。通过MATLAB拟合处理数据实现了对样品局部折射率和厚度高精度、高空间分辨率的实时测量，平面波导厚度测量精度可以达到纳米量级，空间分辨率可达到300 nm。该测量仪结构简单、易于操作，在光学传感和细胞内生物传感领域具有很高的应用价值。

关键词: 波导光学；后焦面成像；光学参数测量仪

Abstract: Based on the basic principle that back focal plane imaging can determine the transmission properties, a polymer planar waveguide optical parameter measuring instrument is designed combining with Fresnel reflection theory of planar waveguides. The real time measurement of the local refractive index and thickness of the sample with high accuracy and high spatial resolution is realized by fitting data with MATLAB. The measurement accuracy of planar waveguide thickness can reach nanometer scale, and the spatial resolution can reach 300 nm. The instrument is simple in structure and easy to operate. It has high application value in optical sensing and intracellular biological sensing fields.

Key words: waveguide optics; back focal plane imaging; optical parameter measuring instrument

施矾朱良富邱冬张斗国. 基于后焦面成像的聚合物平面波导光学参数测量仪 [J]. J4, 2017, 34(3): 374-378.

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