Φ4m口径凹抛物面镜折反零位补偿检验

J4 ›› 2017, Vol. 34 ›› Issue (4): 394-399.

Φ4m口径凹抛物面镜折反零位补偿检验

1南京理工大学电子工程与光电技术学院，江苏南京 210094； 2 中国科学院上海技术物理研究所，上海 200083

收稿日期:2016-05-25 修回日期:2016-07-12 出版日期:2017-07-28 发布日期:2017-08-29

Catadioptirc Compensation Test of A Concave Paraboloidal Mirror with 4m-aperture

Received:2016-05-25 Revised:2016-07-12 Published:2017-07-28 Online:2017-08-29

摘要/Abstract

摘要： 大口径和大相对孔径非球面检验困难一直是制约提高其加工质量的难题，折反射式零位补偿检验是一种综合了Offner折射式和Maksutov反射式补偿检验优点的凹非球面检验方法，补偿能力强，检测光路紧凑。针对口径为4 m、e2=1、顶点曲率半径r0=16000 mm的大口径凹抛物面反射镜，设计了折反射式零位补偿器。基于三级像差理论对补偿器的初始结构进行了规划和计算，采用Zemax软件对初始结构参数进行了优化和仿真，得出了补偿器最终结构，检验光路轴向尺寸约12 m，系统优化后剩余波相差PV为0.005λ。设计和仿真结果表明，这种折反射式补偿器对大口径凹非球面镜的加工检测是非常有利的。

Abstract: It is difficult to test aspheric surface with large aperture or large relative aperture, which is a problem for improving the quality of the aspheric fabrication, catadioptric compensation test is a novel aspheric mirror testing method, which combines the advantages of the Offner refractive and Maksutov reflective compensation test, its compensation ability is strong and its axial testing size is short. In view of a concave paraboloidal reflector, with 4 m aperture，e2=1，vertex radius r0=16000 mm, a catadioptric compensator is designed. Based on the third-order aberration theory, the arrangement and calculation of the initial structure is carried out, with Zemax, the parameters of the initial structure is optimized, and the finial structure is obtained, the axial testing size is about 12 m , the pv value of system residual wavefront error is 0.005λ.The design and simulation results show that this kind of catadioptric compensator is available to test large aperture and concave aspheric mirror.

Key words: optical system design

中图分类号:

0435

胡文琦，叶璐，何勇，郑列华. Φ4m口径凹抛物面镜折反零位补偿检验[J]. J4, 2017, 34(4): 394-399.

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