二维金光栅增强AlGaN/GaN量子阱中红外探测器的垂直光耦合

J4 ›› 2017, Vol. 34 ›› Issue (6): 742-746.

二维金光栅增强AlGaN/GaN量子阱中红外探测器的垂直光耦合

彭飞

上海电子信息职业技术学院

收稿日期:2016-08-26 修回日期:2016-09-29 出版日期:2017-11-28 发布日期:2017-12-11
通讯作者: 彭飞

Vertical optical coupling of AlGaN/GaN Multi-quantum Well Mid-infrared Photodetector via Two-dimensional Gold Grating

Received:2016-08-26 Revised:2016-09-29 Published:2017-11-28 Online:2017-12-11

摘要/Abstract

摘要： 利用对入射光源偏振性不敏感的二维金光栅结构来增强AlGaN/GaN量子阱中红外探测器的垂直光耦合被研究。采用有限元（FEM）法计算了探测器结构中的电场分布和能量流动，发现采用二维金光栅时量子阱区有效电场强度比采用Si3N4钝化材料光栅时高出两个数量级，这主要是由于金光栅与AlGaN界面处激发形成了表面等离激元（SPP），对光能流动方向和光场振动方向产生了强烈的改变。无论光源的偏振性如何，当垂直入射电磁波波长为4.7 μm，电场强度是1(V/m)2时，量子阱区的有效电场强度达到了0.7 (V/m)2，这为实现AlGaN/GaN量子阱中红外探测器焦平面阵列提出了一种解决方案。

关键词: 表面等离激元

Abstract: A two-dimensional gold grating has been studied to enhance the optical coupling of the AlGaN/GaN multi-quantum wells (MQWs) mid-infrared photodetector under normal illumination, which is insensitive to the polarization of incident light. The electric distribution and energy flow were theoretically analyzed by finite element method (FEM). It showed that the effective electric field component Ez perpendicular to the MQWs region obtained via the gold grating was two order of magnitudes higher than the Si3N4 grating. The results should be contributed mainly to the surface plasmon polariton (SPP) excited at the interface of the Au/AlGaN, and it strongly changed the direction of energy flow and vibration of electric field. When the electric field intensity of the incident light was 1 (V/m)2 with normal illumination, the effective electric field intensity was up to 0.7 (V/m)2, which will help to realize the AlGaN/GaN MQWs mid-infrared photodetector focal plane areas (FPAs).

Key words: SPP

中图分类号:

TN215

彭飞. 二维金光栅增强AlGaN/GaN量子阱中红外探测器的垂直光耦合[J]. J4, 2017, 34(6): 742-746.

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