大相对口径离轴凸抛物面检测方法研究

量子电子学报 ›› 2020, Vol. 37 ›› Issue (3): 287-293.

大相对口径离轴凸抛物面检测方法研究

吕敏1，2，胡明勇1，2，李昭阳1，2，赵础矗1，2，孙东起1，2，刘晨凯1，2

1合肥工业大学光电技术研究院，安徽合肥 230009； 2特种显示与成像技术安徽省技术创新中心，安徽合肥 230009

收稿日期:2019-12-26 修回日期:2020-03-24 出版日期:2020-05-28 发布日期:2020-05-28
通讯作者: 联系方式 E-mail:humy8@126.com
作者简介:吕敏（1994-），女，安徽宣城人，研究生，主要从事光学设计及检测方面的研究。E-mail：838126848@qq.com

Research on detection method of large relative caliber off-axis convex paraboloid

LV Min1,2, HU Mingyong1,2, LI Zhaoyang1,2, ZHAO Chuchu1,2, SUN Dongqi1,2，LIU Chenkai1,2

1 Academy of Opto-Electric Technology, Hefei University of Technology, Hefei 230009， China; 2 Special Display and Imaging Technology Innovation Center of Anhui Province, Hefei 230009， China

Received:2019-12-26 Revised:2020-03-24 Published:2020-05-28 Online:2020-05-28

摘要/Abstract

摘要： 大相对口径离轴凸抛物面镜的加工检测是光学加工检测的重要挑战之一。结合一块口径为φ100 mm、离轴量为87.5 mm、曲率半径为500 mm的大相对口径离轴凸抛物镜，计算出母镜加工修磨量，并提出一种工艺球面补偿检测和离轴Hindle球检测相结合的检测方法，有效地避免了单独使用一种检测方法的缺陷，节约了加工成本并进一步提高了检测精度。最终加工完成的大相对口径离轴凸抛物面镜精度均方根（RMS）优于λ/40（λ=632.8 nm），表明此种方法的可行性，可广泛用于实际生产加工中。

关键词: 几何光学, 离轴凸抛物面, 工艺球面补偿检测, 离轴Hindle球检测, 高精度检测

Abstract: The processing inspection of large-relative off-axis convex parabolic mirrors is one of the important challenges in optical processing inspection. Combined with a large relative aperture off-axis convex parabolic lens with a diameter of φ100 mm, an off-axis amount of 87.5 mm, and a radius of curvature of 500 mm, the grinding amount of the master mirror is calculated, and a detection method combining the process spherical compensation detection and off-axis Hindle ball detection is proposed. The method effectively avoids the shortcomings of the two detection methods, not only saves processing costs, but also improves the detection accuracy. The precision root mean square（RMS） of the large-relative off-axis convex parabolic mirror processed at last is better than λ/40 (λ=632.8 nm)， which shows that this method is feasible and can be widely used in practical production and processing.

Key words: geometric optics, off-axis convex paraboloid, process spherical compensation detection, off-axis Hindle ball detection；high-precision inspection

中图分类号:

O435.2

吕敏, 胡明勇, 李昭阳, 赵础矗, 孙东起, 刘晨凯, . 大相对口径离轴凸抛物面检测方法研究[J]. 量子电子学报, 2020, 37(3): 287-293.

LV Min, HU Mingyong, LI Zhaoyang, ZHAO Chuchu, SUN Dongqi, LIU Chenkai, . Research on detection method of large relative caliber off-axis convex paraboloid[J]. Chinese Journal of Quantum Electronics, 2020, 37(3): 287-293.

参考文献 9

[1]	Zhang Yonghong. Research on the Test of the Large Convex Paraboloid(大口径凸抛物面的检测技术研究)[D].Beijing: Master Thesis of Institute of Optics and Electronics, Chinese Academy of Sciences , 2015: 3-14(in Chinese).
[2]	He Yuhang, Li Qiang, Gao Bo, et al. Measurement of the transmission wavefront of large-aperture aspheric lens based on computer-generated hologram [J]. Laser & Optoelectronics Progress（激光与光电子学进展）, 2019, 56(2): 107-112(in Chinese).
[3]	Lu Zhenwu, Li Fengyou, Liu Hua, et al. Testing the curvex aspheric surface by using CGH on curved surface [J]. Journal of Optoelectronics•Laser（光电子•激光）, 2004， 15(9): 1088-1090(in Chinese).
[4]	Wang Jingxian. The Design of Partial Compensator for Convex Aspheric Surface Testing（用于凸非球面面形检测的部分补偿器设计）[D].Beijing: Beijing Institute of Technology, 2016:42-55(in Chinese).
[5]	Li Jiang, Yang Pengli, Li Wenting, et al. Annular sub-aperture stitching used for aspheric testing [J]. Journal of Applied Optics（应用光学）, 2015, 36 (5): 791-794(in Chinese).
[6]	Pan Junhua. Design, Processing and Inspection of Optical Aspheric Surfaces(光学非球面的设计、加工与检验) [M]. Suzhou: Suzhou University Press, 2004: 51-154(in Chinese).
[7]	Chen Ze, Hu Mingyong, Zhao Qi, et al. Compensation testing of technological spherical surface for convex quadric surface[J]. Opto-Electronic Engineering, 2016, 43 (9): 56-61(in Chinese).
[8]	Zhang Yimo. Applied Optics(应用光学) [M]. 3rd Edition. Beijing: Electronic Industry Press, 2008: 344-348(in Chinese).
[9]	Yu Daoyin, Tan Hengying. Engineering Optics [M]. 2nd Edition, Beijing: Mechanical Industry Press, 2006: 104-128(in Chinese).