氟硼铍酸钾晶体及深紫外全固态激光

量子电子学报 ›› 2021, Vol. 38 ›› Issue (2): 131-147.

• “先进光学晶体”专辑 • 上一篇下一篇

氟硼铍酸钾晶体及深紫外全固态激光

王晓洋∗, 刘丽娟

中国科学院理化技术研究所, 北京人工晶体研究发展中心, 中国科学院功能晶体与激光技术重点实验室, 北京100190

收稿日期:2020-11-25 修回日期:2020-12-03 出版日期:2021-03-28 发布日期:2021-03-29
通讯作者: E-mail:xywang@mail.ipc.ac.cn
作者简介:王晓洋( 1967 - ), 江苏常州人, 研究员, 博士生导师, 主要从事无机非金属功能晶体材料方面的研究。E-mail: xywang@mail.ipc.ac.cn
基金资助:
Supported by Project of Major Scientific Instruments, National Natural Science Foundation of China (国家自然科学基金重大科研仪器研制项目, 21527804)

KBe2BO3F2 Crystal and All-solid-state Deep Ultraviolet Laser

WANG Xiaoyang∗, LIU Lijuan

Key Laboratory of Functional Crystals and Laser Technology, Beijing Center for Crystal Research and Development, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China

Received:2020-11-25 Revised:2020-12-03 Published:2021-03-28 Online:2021-03-29

摘要/Abstract

摘要： 深紫外(DUV) 全固态相干光源( < 200 nm) 在前沿科学、高技术等领域有着重要应用。将商业化的高功率可见/近红外全固态激光通过非线性光学晶体进行多级变频是实现该光源的有效途径。从双折射和色散两个方面阐述了满足深紫外非线性光学晶体的基本条件, 介绍了深紫外非线性光学晶体的探索和实用化所需克服的技术困难; 重点以氟硼铍酸钾(KBBF) 和氟硼铍酸铷(RBBF) 晶体为代表, 介绍其发现过程、晶体生长技术、棱镜耦合器件技术、光学性质以及深紫外波段倍频能力; 还详细介绍了相关的深紫外全固态激光的研究进展, 以及该光源在先进科学仪器上的应用, 尤其是在超高分辨率光电子能谱仪方面的应用和取得的重要成果。最后展望了深紫外非线性光学晶体及深紫外全固态激光技术的发展方向。

关键词: 非线性光学, 氟硼铍酸钾深紫外非线性光学晶体, 棱镜耦合器件, 深紫外全固态激光

Abstract: All-solid-state deep ultraviolet (DUV) coherent light sources ( < 200 nm) have important applications in frontier science, high technology and many other fields. An effective and feasible technical approach is to use commercially available visible and near-infrared all-solid-state lasers as the fundamental frequency light source to generate DUV laser through cascaded frequency conversion by nonlinear optical (NLO) crystals. The basic conditions of DUV NLO crystals are described from two aspects of birefringence and dispersion, and the research progress of DUV NLO crystals and technical difficulties need to be overcome for applications are introduced. Taking KBe2BO3F2 (KBBF) and RbBe2BO3F2 (RBBF) as examples, the discovery, crystal growth, the corresponding prism-coupled device technology, their main optical properties, and their ability to generate DUV coherent light are reviewed. The research progress of DUV coherent light sources based on KBBF crystals and prism-coupled technology are discussed in detail, as well as their applications on the advanced scientific instruments, especially on ultra-high-resolution photoelectron spectrometers. At last, the perspectives for future development of DUV NLO crystals and all-solid-state DUV laser technology are given.

Key words: nonlinear optics, KBe2BO3F2 deep-ultraviolet nonlinear optical crystal, prism-coupled device, all-solid-state deep-ultraviolet laser

中图分类号:

O734

王晓洋∗, 刘丽娟. 氟硼铍酸钾晶体及深紫外全固态激光[J]. 量子电子学报, 2021, 38(2): 131-147.

WANG Xiaoyang∗, LIU Lijuan . KBe2BO3F2 Crystal and All-solid-state Deep Ultraviolet Laser[J]. Chinese Journal of Quantum Electronics, 2021, 38(2): 131-147.

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氟硼铍酸钾晶体及深紫外全固态激光

KBe2BO3F2 Crystal and All-solid-state Deep Ultraviolet Laser

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