量子电子学报 ›› 2024, Vol. 41 ›› Issue (2): 300-309.doi: 10.3969/j.issn.1007-5461.2024.02.012

• 激光技术与器件 • 上一篇    下一篇

探测器阵列高精度二维标定平台控制系统设计

于龙昆 1, 李智祥 2,3, 温小辉 2,3, 刘辉 2,3, 谭逢富 3*   

  1. ( 1 南昌大学先进制造学院, 江西 南昌 330031; 2 南昌大学信息工程学院, 江西 南昌 330031; 3 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 中国科学院大气光学重点实验室, 安徽 合肥 230031 )
  • 收稿日期:2022-12-17 修回日期:2023-01-09 出版日期:2024-03-28 发布日期:2024-03-28
  • 通讯作者: E-mail: fftan@aiofm.ac.cn E-mail:E-mail: fftan@aiofm.ac.cn
  • 作者简介:于龙昆 ( 1987 - ), 江西九江人, 博士, 副教授, 硕士生导师, 主要从事大气光学、光电测量技术、图形处理等方面的研究。
  • 基金资助:
    国家自然科学基金 (42165007)

Design of high‑precision two‑dimensional calibration platform control system for detector array

YU Longkun 1, LI Zhixiang 2, 3, WEN Xiaohui 2, 3, LIU Hui 2, 3, TAN Fengfu 3*   

  1. ( 1 School of Advanced Manufacturing, Nanchang University, Nanchang 330031, China; 2 School of Information Engineering, Nanchang University, Nanchang 330031, China; 3 Key Laboratory of Atmospheric Optics, Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China )
  • Received:2022-12-17 Revised:2023-01-09 Published:2024-03-28 Online:2024-03-28

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摘要： 为了实现快速、高精度探测器阵列标定, 对探测器阵列高精度二维标定平台控制系统进行了研究, 设计了采 用单片机控制步进电机加编码器的闭环位移控制系统。介绍了该平台的标定原理和硬、软件控制系统设计, 并对控 制PID 算法进行了研究, 最后搭建了标定系统对控制系统进行综合测试。实验结果表明该控制系统有良好的控制能 力, 平台在600 mm× 600 mm 的有效行程内定位精度可达 −11～12 μm, 十次单点测试数据变异系数为 0.13%, 连续模 式下平均测量误差为1.65%。该平台设计满足探测器阵列的标定要求, 为探测器阵列标定提供了一种有效手段。

关键词: 控制工程, 探测器阵列标定, 二维平台, 闭环控制系统, 步进电机, PID 算法

Abstract: In order to realize fast and high-precision calibration of detector array, the control system of
high-precision two-dimensional calibration platform for detector array is studied, and a closed-loop
displacement control system using a single chip computer to control stepping motor and encoder is
designed in this work. Firstly, the calibration principle of the platform and the design of hardware and
software control system are introduced, then the control PID algorithm is studied. Finally, a calibration
system is built to test the designed control system comprehensively. The experimental results show that
the control system has good control ability. The positioning accuracy of the platform can reach
−11~12 μm within the effective itinerary of 600 mm × 600 mm. The variation coefficient of ten single
 point test data is 0.13%, and the average measurement error in continuous mode is 1.65%, indicating that
the designed platform meets the calibration requirements of detector array and provides an effective
means for the calibration of detector array.

Key words: control engineering, detector array calibration, two-dimensional platform, closed-loop control system, stepping motor, PID algorithm

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