量子电子学报 ›› 2026, Vol. 43 ›› Issue (4): 658-666.doi: 10.3969/j.issn.1007-5461.2026.04.015

• 光学材料 • 上一篇    下一篇

基于纳米压痕实验的 YAG 晶体不同晶面断裂韧度研究

马荣国1,张庆礼2,高进云3,孙贵华4,窦仁勤5,张瑞6,陈照1,韩松7,王小飞3,张德明1,孙彧8,刘文鹏4   

  1. 1 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 光子器件与材料安徽省重点实验室, 安徽 合肥 230031; 2 中国科学技术大学, 安徽 合肥 230026; 3 先进激光技术安徽省实验室, 安徽 合肥 230037
  • 收稿日期:2023-09-19 修回日期:2023-10-17 出版日期:2026-07-28 发布日期:2026-07-27
  • 通讯作者: E-mail: zql@aiofm.ac.cn E-mail:E-mail: zql@aiofm.ac.cn
  • 作者简介:马荣国 ( 1997 - ), 陕西商洛人, 博士研究生, 主要从事激光晶体元件超精密加工技术方面的研究。E-mail: marongguo0551@163.com
  • 基金资助:
    国家重点研发计划 (2022YFB3605700), 国家自然科学基金 (52272011, 11875248), 中国科学院青年创新促进会 (2023463), 安徽省科技重大专项 (202203a05020002)

Study on fracture toughness of YAG crystals with different crystal faces based on nanoindentation experiments

MA Rongguo 1,2,3 , ZHANG Qingli 1,3*, GAO Jinyun 1,3 , SUN Guihua 1,3 , DOU Renqin 1,3 ,ZHANG Rui 1,3 , CHEN Zhao 1,2,3 , HAN Song 1,3 , WANG Xiaofei 1,3 , ZHANG Deming 1,3 , SUN Yu 1,3 , LIU Wenpeng 1,3   

  1. 1 Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China; 2 University of Science and Technology of China, Hefei 230026, China; 3 Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
  • Received:2023-09-19 Revised:2023-10-17 Published:2026-07-28 Online:2026-07-27

摘要: 作为一种典型脆性材料, YAG晶体在光学加工过程中极易产生微裂纹, 严重影响元件表面质量。断裂韧度(KIC)反映了材料抵抗裂纹扩展的能力, 微观尺度下KIC的准确测量对YAG晶体的超精密加工具有重要意义。本文对YAG晶体(100)、(110)、(111)三个立方晶系典型晶面进行了纳米压痕实验。首先使用Berkovich金刚石压头测得不同晶面样品的硬度(H)和弹性模量(E), 并利用扫描电子显微镜测量Cube-corner金刚石压头产生的径向裂纹长度c; 随后根据实验测得的H、E和c计算出(100)、(110)和(111)晶面的KIC分别为1.473 MPa⋅m1/2 、2.194 MPa⋅m1/2 和1.700 MPa⋅m1/2 , 并进一步通过表面能探讨了3个晶面KIC不同的本质原因。

关键词: 断裂韧度, 钇铝石榴石晶体, 纳米压痕, Berkovich压头, Cube-corner压头, 表面能

Abstract: As a typical brittle material, YAG crystals are highly prone to microcracks during optical processing, which seriously affects the surface quality of the components. Fracture toughness (KIC ) reflects the ability of a material to resist crack extension, and accurate measurement of KIC at the microscopic scale is of great significance for ultra-precision processing of YAG crystals. Nanoindentation experiments were carried out on the three typical crystal faces (100), (110), and (111) of YAG crystals in this work. Firstly, the indentation hardness (H) and elastic modulus (E) of samples with different crystal faces were measured using a Berkovich diamond indenter, and the radial crack length c generated by the Cube-corner diamond indenter was measured by scanning electron microscopy. Then, based on the experimentally measured H, E and c, the KIC of (100), (110) and (111) crystal faces were calculated to be 1.473 MPa⋅m1/2 , 2.194 MPa⋅m1/2 and 1.700 MPa⋅m1/2 , respectively. Furthermore, the essential reasons for the different KIC of the three crystal faces were explored through surface energy analysis.

Key words: fracture toughness, yttrium aluminum garnet crystal, nanoindentation, Berkovich indenter, Cube-corner indenter, surface energy

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