量子电子学报

• 基础光学 • 上一篇    下一篇

一种利用半反半透透镜检验二次非球面的方法

赵鹏玮1,2, 叶璐1, 胡文琦1, 郑列华1   

  1. 1中国科学院上海技术物理研究所公共技术室,上海 200080; 2中国科学院大学,北京 100049
  • 出版日期:2019-05-28 发布日期:2019-05-14
  • 通讯作者: 郑列华 (1966 - ),男,甘肃兰州人,博士,研究员,博士生导师,主要从事红外光电遥感仪器光机结构,空间长寿命转动机构,大口径光学非球面制造技术研究。 E-mail:dimo818@126.com
  • 作者简介:赵鹏玮 (1994 - ),男,河北石家庄人,博士生,主要方向为光学检验及光学加工。E-mail:zhao12pengwei@163.com

A testing of conic aspheric surface with semi-transmitting lens

ZHAO Pengwei1,2, YE Lu1, HU Wenqi1, ZHENG Liehua1   

  1. 1 Department of Public Technology, Shanghai Institute of Technical Physics, Chinese Academy of Science, Shanghai 200083, China 2 University of Chinese Academy of Sciences, Beijing 100049, China
  • Published:2019-05-28 Online:2019-05-14

摘要: 将半反半透透镜应用于非球面检验。半反半透面和待检验面作为透镜的两个面,空间上相互靠近。半反半透面实现光线自准,同时也对波前进行补偿。这样,既消除了中心遮挡,又可以减小光学系统的尺寸,同时也增强了检验的能力。本文根据三级像差理论对这一方法进行了推导,进而给出了从待检面的参数得到检验系统参数的方法。根据这一方法设计了一个口径300 mm,焦距1200 mm凸反射镜的检验光路,通过光学设计软件zemax进行优化,优化后系统的波像差小于1/(100λ),满足光学检验的要求。

关键词: 非球面辅助光学系统设计, 三级像差理论, 无像差双焦点, 半反半透非球面检验

Abstract: Use the semi-transmitting lens in the test of aspheric surface. The semi-transmitting surface and the surface under testing are close to each other in space as two surface of the lens. Retro-reflected surface can also compensate the aberrations. This testing can eliminate the obscuration, decrease the size and increase the ability of compensation. According to the third order aberration theory, give a method about getting the testing system from the surface under testing. Get an optical system to test a convex aspheric mirror which diameter is 300 mm and focus is 1200 mm. After the optimization with ZEMAX, the wave front aberration of the testing system is lower than 1/(100λ), which meets the requirement of optical testing.

Key words: design of aspheric auxiliary optical system, third order aberration theory, no-aberration double-focus, aspheric testing with semi-transmitting lens;