纳秒脉冲激光制备黑硅及其光学性能的研究
王 可, 王梓霖, 周晓雨, 黄伟其, 张铁民, 彭鸿雁, 王安琛, 张 茜, 黄忠梅, 刘世荣
Preparation of black silicon by nanosecond pulsed laser and its optical properties
WANG Ke , , WANG Zilin , ZHOU Xiaoyu , HUANG Weiqi , ZHANG Tiemin , PENG Hongyan , WANG Anchen , ZHANG Xi , HUANG Zhongmei , , LIU Shirong
量子电子学报
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2024, (5): 813
-821
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DOI: 10.3969/j.issn.1007-5461.2024.05.011