基于改进 ResNet-50 算法的 EMT 缺陷成像方法
王晋华, 王明泉, 路宇鹏, 曹振锋, 吴志成
EMT defect imaging method based on the improvedResNet‑50 algorithm
WANG Jinhua, WANG Mingquan , LU Yupeng, CAO Zhenfeng, WU Zhicheng
量子电子学报
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2026, (1): 75
-87
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DOI: 10.3969/j.issn.1007-5461.2026.01.006