Al掺杂半导体Mg2Si薄膜的制备及光学带隙研究
王善兰1，廖杨芳1，2，房迪1，吴宏仙1，肖清泉1，杨云良1，谢泉1?
Preparation and optical band gap of Al doped Mg2Si thin films
WANG Shanlan1, LIAO Yangfang1,2, FANG Di1, WU Hongxian1, XIAO Qingquan1, YANG Yunliang1, XIE Quan1
量子电子学报
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2017, (5): 635
-640
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