准分子激光低抖动延时同步系统
胡泽雄, 游利兵, ∗, 寸 超, 王宏伟, 范 军, 王 琪, 张艳琳, 方晓东
Time-delay synchronization system with low jitter for excimer laser
HU Zexiong , , YOU Libing , ∗ , CUN Chao , WANG Hongwei , FAN Jun , WANG Qi , ZHANG Yanlin , FANG Xiaodong ,
量子电子学报
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2023, (1): 69
-78
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DOI: 10.3969/j.issn.1007-5461.2023.01.008