Application and key technology of high energy and high power excimer laser

Abstract

Abstract:

The practical large energy and high power excimer laser are widely used in materials processing and surface treatment. The applications of excimer lasers in the flat panel display industry, solar photovoltaic industry, semiconductor industry and automobile manufacturing industry were introduced. The key technologies employed to improve the performance of excimer lasers were analyzed, including the technology of large area uniform
discharge, pre-ionization, and high voltage pulse technology. The dual-chamber synchronization technology was used to obtain higher energy and power.

Key words: laser techniques, excimer laser, large energy, high power, magnetic pulse compression, laser annealing

CLC Number:

TN248.2

ZHAO Jia-min, YOU Li-bing, YU Yin-shan, FANG Xiao-dong. Application and key technology of high energy and high power excimer laser[J]. J4, 2013, 30(6): 696-702.

References

1. 唐娟，廖健宏，蒙红云等。紫外激光器及其在激光加工中的应用[J]。激光与光电子学进展，2007，44（8）：52-56。 Tang Juan, Liao Jianhong, Meng Hongyun, et al. Ultraviolet Laser and Its Application in Laser Processing [J]. Laser and Optoelectronics Progress, 2007,44(8)：52-56 2. Basting D, Stamm U. The development of excimer laser technology-history and future prospects [J]. International J. Research in physical Chemistry & Chemical Physics, 2001,215(15):75-99 3. 余吟山，方晓东，李会等。放电激励的100W XeCl 准分子激光器 [J]。量子电子学报，1996，13（4）：329-331。 Yu Yinshan, Fang Xiaodong, Li Hui, et al. Discharge –Pumped 100W XeCl Excimer Laser. Chinese Journal of Quantum Electronics [J], 1996,13[4]:329-331 4. Bagayev S N, Razhev A M, Zhupik A A, et al. 1.3J KrF excimer laser with efficiency 2.5% [C]. SPIE,2003,5120:231-235 5. Product catalog of coherent. www.coherent.com 6. Advanced laser processing enables next generation LED and LCD manufacturing. Coherent Inc. www.coherent.com 7. Basting D, Marowsky G. Excimer Laser Technology [M]. Germany Berlin: Springer, 2005,306-308 8．Masters A, Geuking T, et al. Beam-shaping optics expand excimer-laser applications. Laser Focus World, 2005, 41:99-103 9. 余吟山，游利兵，梁勖，方晓东。准分子激光技术发展 [J]。中国激光，2010，21(11)：2253-2270 Yu Yinshan, You Libing, Liang Xu, Fang Xiaodong. Progress of Excimer Lasers Technology [J]. Chinese Journal of Laser , 2010, 21(11) :2253-2270 10. Coherent Inc. www.coherent.com 11. Delmdahl R, Paetzel R, The Midas Touch: Surface Processing With the UV Excimer Laser. Laser Technik Journal, 1/2009,24-29 12. 成立，李春明，王振宇等。纳米CMOS器件中超浅结离子掺杂新技术 [J]。半导体技术，2004，29（09）：30-44 Cheng Li, Li Chunming, Wang Zhenyu, et al. Several new ion beam doping technologies of Ultra-shallow Junction for Nanometer CMOS fabrication [J]. Semiconductor Technology, 2004, 29(09):30-44 13. Seung-Woo Do, Seong Ho Kong, Yong-Hyun Lee. Ultra-shallow Junction Formation Using Plasma Doping and Excimer Laser Annealing for Nano-technology CMOS Applications [J]. Journal of the Korean Physical Society, 2009,55(3):1065-1069 14. Kentaro Shibahara, Senior Member, IEEE, Takanori Eto, Ken-ichi Kurobe. Merits of Heat Assist for Melt Laser Annealing [J]. IEEE Transactions on Electron Devises, 2006,53(5):1059-1063 15. Targeting diesel engine efficiency. [EB/OL] http://www.industrial-lasers.com/articles/print/volume-19/issue-10/features/targeting-diesel-engine-efficiency.html 16. Wang Ting, Guo Xia, Fang Yuan, et al. Integration of GaN thin films with silicon substrates by fusion bonding and laser lift-off. Chinese Optics Letters, 2006, 4(7):416-418. 17. Ralph F, Delmdahl. Power scaling of excimer lasers drives display and lidar applications. SPIE [C]. 10.1117/2.120121.004030. 18. Chang T Y. Improved uniform-field electrode profiles for TEA laser and high-voltage applications [J]. Review of Scientific Instruments, 1973,44(4): 405-407 19. 刘晶儒，易爱平，胡志云等。准分子激光技术及应用[M]。北京：国防工业出版社，2009 :31-33。 Liu Jingru, Yi Aiping, Hu Zhiyun et al. Excimer Laser Technology and Applications [M].Beijing: National Defense Industry Press, 2009:31-33 20. Basting D, Marowsky G. Excimer Laser Technology [M]. Germany Berlin: Springer, 2005.41-103 21. 邓国庆，余吟山，朱志强。准分子激光放电回路的研究。量子电子学报，2004，21（4）：456-458 Deng Guoqing, Yu Yinshan, Zhu Zhiqiang. Study on discharge circuit of excimer laser. Chinese Journal of Quantum Electronics[J](量子电子学报). 2004.21(4): 456-458 22. Partlo Willim, Sandstrom Rick, Fomenkov Igor et al. A Low Cost of Ownership KrF Excimer Light source Using a Novel Pulse Power and Chamber Configuration [J], in Proc. SPIE, 1995, Vol. 2440: 90-100. 23. Ness R, Melcher P, Ferguson G, et al. A decade of solid state pulsed power development at cymer INC [C]. IEEE International Power Modulator Conference, 2004, 228-233.

[1]	ZHANG Zhen , DUAN Dian , CHEN Yujun , WEI Shanshan , MA Jindong , YAO Bo , MAO Qinghe . Picosecond pulse fiber front end based on narrow⁃band dissipative soliton Figure⁃9 fiber oscillator and single⁃stage single⁃mode fiber amplifier [J]. Chinese Journal of Quantum Electronics, 2023, 40(4): 476-482.
[2]	TANG Jingling , QI Yue , BAI Zhenxu , QI Yaoyao , DING Jie , YAN Bingzheng , WANG Yulei , LYU Zhiwei , . Passively Q⁃switched sub⁃nanosecond laser based on YAG/Nd: YAG/Cr4+: YAG composite crystal [J]. Chinese Journal of Quantum Electronics, 2023, 40(4): 483-491.
[3]	WANG Chang , ∗ , SONG Gaohui , , TAN Zhiyong , , CAO Juncheng , ∗. Research progress on terahertz imaging technology based on semiconductor photonics devices [J]. Chinese Journal of Quantum Electronics, 2023, 40(2): 181-192.
[4]	CHEN Yujun , , YAO Bo , LIU Haowei , WEI Shanshan , MAO Qinghe , ∗. Development of single-longitudinal-mode DBR ﬁber laser based on thulium-doped silica glass ﬁber [J]. Chinese Journal of Quantum Electronics, 2023, 40(1): 56-61.
[5]	WEI Shiqin , WANG Yao , WANG Mengzhen , WANG Fang , LIU Junjie , LIU Yuhuai , ∗. Performance of deep ultraviolet laser diode based on well-type ladder electron barrier [J]. Chinese Journal of Quantum Electronics, 2023, 40(1): 62-68.
[6]	ZHONG Yulong , , CHENG Tingqing ∗. Experimental study of LD side-pumped Tm:YAG electro-optically Q-switched laser [J]. Chinese Journal of Quantum Electronics, 2022, 39(5): 736-741.
[7]	ZHANG Yanlin , , YOU Libing , ∗ , WANG Hongwei , WANG Qi , HU Zexiong , , FAN Jun , , FANG Xiaodong , . Excimer laser ampliﬁcation technology of ultraviolet ultrashort pulse [J]. Chinese Journal of Quantum Electronics, 2022, 39(5): 677-686.
[8]	ZHANG Rui , MEI Dajiang , ∗ , SHI Xiaotu , , MA Rongguo , , ZHANG Qingli , ∗ , DOU Renqin , , LIU Wenpeng , . Research progress of dislocation of YAG crystal [J]. Chinese Journal of Quantum Electronics, 2022, 39(5): 687-706.
[9]	YANG Hao, TENG Hao, ∗, LYU Renchong, ZHU Jiangfeng∗, WEI Zhiyi, . Study on femtosecond chirped-pulse amplification based on concentric stretcher [J]. Chinese Journal of Quantum Electronics, 2022, 39(4): 566-573.
[10]	KANG Renzhu, LYU Renchong, TENG Hao, ZHU Jiangfeng, WEI Zhiyi, . Study on Yb: KGW regenerative amplifier based on improved Frantz-Nodvik equation [J]. Chinese Journal of Quantum Electronics, 2022, 39(4): 574-582.
[11]	ZHANG Aoxiang, WANG Yao, WANG Mengzhen, WEI Shiqin, WANG Fang, LIU Yuhuai, . Performance optimization of AlGaN-based deep ultraviolet laser diode with M-shaped hole barrier structure [J]. Chinese Journal of Quantum Electronics, 2022, 39(4): 583-590.
[12]	LI Chenrui, LI Xiangle, YING Jiajun, WU Yitong, SHENG Yuqi, ZHOU Yong, GAO Weiqing. Beat-free 1570 nm fiber laser and its application in 2 m wave band fiber laser generation [J]. Chinese Journal of Quantum Electronics, 2022, 39(4): 591-597.
[13]	BI Xiangli , ∗ , SONG Yiheng , , YAN Xiusheng , , GAO Wenqing , . Research of dual-wavelength intelligent cooperative laser guidance method [J]. Chinese Journal of Quantum Electronics, 2021, 38(6): 863-871.
[14]	WANG Gang, REN Changliang∗. Research on light source in new quantum radar [J]. Chinese Journal of Quantum Electronics, 2020, 37(6): 659-668.
[15]	CHEN Youze, ZHANG Chen, ZHAO Yunkun, LV liang. Measurement of laser free spectral range based on three-longitudinal mode laser self-mixing sensing system [J]. Chinese Journal of Quantum Electronics, 2020, 37(6): 669-676.