J4 ›› 2015, Vol. 32 ›› Issue (4): 431-437.

• Laser Tech. and Devices • Previous Articles     Next Articles

Design of temperature control system of excimer laser

HU Ming-qing1,2，HAN Xiao-quan2, ZHOU Yi2, FENG Ze-bing2，ZHOU Wei-hu1,2, BAI Lu-jun2   

  1. 1 School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei, Anhui,230009, China; 
    2 Academy of Opto-electronics, Chinese Academy of Sciences, Beijing 100094, China
  • Received:2014-09-28 Revised:2014-12-18 Published:2015-07-28 Online:2015-08-04

Abstract:

The stability of temperature in the chamber of excimer laser has a great effect on working performance of the excimer especially for the stability of the output energy and the laser’s useful life .So it is very important to keep the chamber temperature constantly. Based on that, a high precision temperature control system of excimer laser was designed, together with its composition and working principle. Meanwhile ,the software and hardware and optimization control algorithm were designed. Experimental results indicate that the designed system has superior control precision which provides a favorable temperature environment for the laser’s operation.

Key words: laser techniques, temperature control, intelligent PID, excimer laser, algorithm

CLC Number: 

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