Wavefront reconstruction of aspherical surface

J4 ›› 2016, Vol. 33 ›› Issue (1): 1-7.

• Basic Optics • Next Articles

Wavefront reconstruction of aspherical surface

YANG Ke, FU Dongming, ZHANG Jinping, ZHENG Liehua

Shanghai Institute of Technical Physics, Chinese Academy of Sciences. Shanghai 200083, China

Received:2014-12-24 Revised:2015-02-02 Published:2016-01-28 Online:2016-01-06

Abstract

Abstract:

In order to realize wavefront reconstruction over full aperture of aspheric surface at the beginning of polishing, a novel method combing coordinate measuring machine (CMM) and digital interferometer is proposed. The main part of surface is able to be measured by interferometer. The rest part, wavefront of which cannot be recovered by interferometer, could be measured by CMM. By combing the data from CMM and interferometer, the error of surface can be reconstructed and the wavefront over full aperture can be obtained ultimately. In our testing, wavefront of an off-axis aspheric surface with 540mm diameter was successfully reconstructed over full aperture during the process from grinding to polishing. The availability of the method for wavefront reconstruction of aspheric surface is proved by the results.

Key words: optical detection, wavefront reconstruction,coordinate measuring machining, off-axis asphere

CLC Number:

O435

YANG Ke, FU Dongming, ZHANG Jinping, ZHENG Liehua. Wavefront reconstruction of aspherical surface[J]. J4, 2016, 33(1): 1-7.

References

[1] Daniel Malacara. Optical Shop Testing (光学车间检验) [M]. Trans. By Bai Guoqiang, Xue Junao transl, Bei jing: China Machine Press, 1983: 397~ 416 (in Chinese).
[2] Pan Junhua. The design, Manufacture and Test of the Aspherical Optical Surfaces (光学非球面的设计、加工与检验) [M]. Suzhou: Soochow University Press, 2004: 147 151 (in Chinese).
[3] Cheng Haobo, Wang Yingwei. Research on testing technology for aspheric (非球面零件光学检测技术研究) [J]. Aviation Precision Manufacturing Technology (航空精密制造技术), 2004, 40(4): 8-10 (in Chinese).
[4] Huang P S, Xu X R. Design of an optical probe for surface profile measurement [J]. Opt. Eng., 1999, 38(7): 1223-1228.
[5] Chen Xi, Guo Peiji, Wang Jianming, et al. Off-axis aspheric surface measurement by coordinate contour measuring machine (离轴非球面三坐标检测技术) [J]. Optical Technique (光学技术), 2014,04:339-344 (in Chinese).
[6] Zheng Ligong. Research on key technology of the CCOS fabrication of off-axis aspheric mirror (离轴非球面CSOS加工过程关键技术研究) [D]. Changchun: Changchun Institute Of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2003 (in Chinese).
[7] Martin B. Large off-axis mirrors key to giant astronomical telescope[C]. In Proc of SHE. 2009, 1432: 1-3.
[8] Kong Xianglei, Hao Peinming, Ding Houyue. The Manufacturing of Concave Aspheric Surface with Large Speed Aperture (大相对孔径凹非球面镜的加工) [J]. Chinese Journal of Quantum Electronics (量子电子学报), 2001, 18(1): 50-55 (in Chinese).
[9] Lin Changqing, Jing Hongwei, et al. Measuring technique for off-axis aspherical mirror in fine grinding process using coordinate measurement machine(离轴非球面镜精磨阶段的三坐标检测技术) [J]. High Power Laser and Particle Beams (强激光与粒子束), 2012, 24(11): 2665-2668 (in Chinese).
[10] Forman P F. The Zygo interferometer system [C]. In 23rd Annual Technical Symposium, International Society for Optics and Photonics, 1979: 41-49.

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