J4 ›› 2017, Vol. 34 ›› Issue (1): 76-80.

• Laser Applications • Previous Articles     Next Articles

Improvement of longitudinal resolution of micro/nano scale polymer structure with radially polarized beam

LIN Le1, 3, ZHENG Meiling1, DONG Xianzi1, JIN Feng1, ZHANG Yongliang1,ZHAO Zhensheng1, DUAN Xuanming1, 2   

  1. 1 Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China; 2 Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400174, China; 3 Graduate University of Chinese Academy of Sciences, Beijing 100190, China
  • Received:2015-10-19 Revised:2015-11-27 Published:2017-01-28 Online:2017-01-28

Abstract: The radially polarized femtosecond pulse laser is investigated and introduced into the micro/nano processing system which is based on two-photon absorption theory. The two-dimension micro/nano polymer structure with higher longitudinal resolution and lower aspect ratio is obtained. Theoretical simulation of intensity distribution within focal light field indicates that the radially polarized femtosecond pulse laser can reduce the lateral resolution of polymer structure to a certain extent while improving the longitudinal resolution, which reduces the aspect ratio of the polymer structure. The results obtained by characterizing the polymer structure with the scanning electron microscopy are in good agreement with the theoretical simulation results. Results show that the radially polarized femtosecond laser can improve the longitudinal resolution of micro/nano scale polymer structure. It has good application prospects in the field of laser lithography.

Key words: nonlinear optics; longitudinal resolution; two-photon fabrication; radial polarization; micro/nano polymer structure