In situ measurement of damage characteristics of fused quartz

Abstract

Abstract: In order to establish a defect detection system of fused quartz and improve laser-induced damage threshold, a device of in situ measuring fused quartz damage characteristics is designed. It consists of two parts, photothermal scanning measurement and Raman spectral measurement. The experimental results show that, the equipment can not only measure fixed point damage characteristics of fused quartz, but also get the absorption characteristics and defect distribution of fused quartz by two-dimensional photothermal scanning. Moreover, the Raman spectral information and material modification information caused by laser irradiation could be obtained in situ through the micro Raman spectrum measurement module of the device, which is of great significance to control and evaluate the laser damage characteristics of fused quartz effectively.

Key words: laser technique, defect inspection, fused quartz, photo-thermal absorption, Raman spectrum

CLC Number:

O433.1

LI Wencai, MA Yuliang, CHEN Jian. In situ measurement of damage characteristics of fused quartz[J]. Chinese Journal of Quantum Electronics, 2021, 38(1): 94-98.

References 36

[1]	Laurence T A, Bude J D, Sonny L, et al. Extracting the distribution of laser damage precursors on fused silica surfaces for 351
	nm, 3 ns laser pulses at high fluences (20-150 J/cm2) [J]. Optics Express, 2012, 20(10): 11561-11573.
[2]	Liu H, Ye X, Zhou X, et al. Subsurface defects characterization and laser damage performance of fused silica optics during
	HF-etched process [J]. Optical Materials, 2014, 36(5): 855-860.
[3]	Du D, Liu X, Korn G, et al. Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs [J].
	Applied Physics Letters, 1994, 64(23): 3071-3073.
[4]	Ma B, Shen Z, He P, et al. Detection of subsurface defects of fused silica optics by confocal scattering microscopy [J]. Chinese
	Optics Letters, 2010, 8(3): 296-299.
[5]	Huang J, Liu H, Wang F, et al. Influence of bulk defects on bulk damage performance of fused silica optics at 355 nm
	nanosecond pulse laser [J]. Optics Express, 2017, 25(26): 33416-33428.
[6]	Liu H J, Wang F R, Luo Q, et al. Experimental comparison of damage performance induced by nanosecond 1 ! laser between
	K9 and fused silica optics [J]. Acta Physica Sinica, 2012, 61(7): 076103.
	刘红捷, 王凤蕊, 罗青，等. K9 和熔石英玻璃纳秒基频激光损伤特性的实验对比研究[J]. 物理学报, 2012, 61(7):
07	6103.
[7]	Shao J D, Dai Y P, Xu Q. Progress on optical components for ICF laser facility [J]. Optics and Precision Engineering, 2016,
24	(12): 2889-2895.
	邵建达, 戴亚平, 许乔. 惯性约束聚变激光驱动装置用光学元器件的研究进展[J]. 光学精密工程, 2016, 24(12):
28	89-2895.
[8]	Xu R. Light scattering: A review of particle characterization applications [J]. Particuology, 2015, 18: 11-21.
[9]	Carlos H H, Douglas P H. Emission reabsorption laser induced fluorescence (ERLIF) film thickness measurement [J]. Measurement
	Science and Technology, 2001, 12(4): 467-477.
[10]	Wu Z, Thomsen M, Kuo P, et al. Photothermal characterization of optical thin film coatings [J]. Optical Engineering, 1997,
36	: 251-262.
[11]	Han Y, Wu Z, Joseph S R, et al. Pulsed photothermal deflection and diffraction effects: Numerical modeling based on Fresnel
	diffraction theory [J]. Optical Engineering, 1999, 38(12): 2122-2128.
[12]	Wu Z, Chen J, Dong J. Photothermal microscopy: An effective diagnostic tool for laser irradiation effects on fused silica and
	KDP [C]. Proceedings of SPIE, 2015, 9543: 95431V.
[13]	Carr C W, Radousky H B, Rubenchik A M, et al. Localized dynamics during laser-induced damage in optical materials [J].
	Physical Review Letters, 2004, 92: 087401.
[14]	DeMange P, Negres R A, Raman R N, et al. Role of phase instabilities in the early response of bulk fused silica during
	laser-induced breakdown [J]. Physical Review B, 2011, 84: 054118.
[15]	Itatani J, Qu´er´e F, Yudin G L, et al. Attosecond streak camera [J]. Physical Review Letters, 2002, 88: 173903.
[16]	Shepard C L, Campbell P M. Measurements of lateral thermal smoothing of 0.53 m laser intensity nonuniformities via shockwave
	analysis [J]. Physical Review A, 1989, 39: 1344-1350.
[17]	Chen J, Dong J, Wu Z. In-situ investigation of damage processes on fused silica induced by a pulsed 355 nm laser with high
	repetition rate [C]. Proceedings of SPIE, 2015, 9345: 93450A.
[18]	Wang Y D, Liu X M. Research progress of stand-off Raman spectroscopy [J]. Chinese Journal of Quantum Electronics, 2019,
36	(3): 257-263.
	王彦丁, 刘晓萌. 远程拉曼光谱技术研究进展[J]. 量子电子学报, 2019, 36(3): 257-263.