Chinese Journal of Quantum Electronics ›› 2022, Vol. 39 ›› Issue (5): 752-760.doi: 10.3969/j.issn.1007-5461.2022.05.008

• Laser Tech. and Devices • Previous Articles     Next Articles

Perovskite photodetector based on CH3NH3PbI3 thin film arrays

YE Yuqi 1,2 , WANG Shimao 1 , SHAN Xueyan 1,2 , ZHAO Xiao 1,2 , MENG Gang 1∗   

  1. ( 1 Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China; 2 University of Science and Technology of China, Hefei 230026, China )
  • Received:2021-02-24 Revised:2021-03-17 Published:2022-09-28 Online:2022-09-28

Abstract: Halide perovskite possesses excellent photoelectric properties and can be prepared by lowtemperature solution method. Photodetector arrays made of halide perovskite are highly required in the area of imaging, optical communication and other fields. However, halide perovskite can be easily dissolved by conventional solvents (including developer), which makes it incompatible with photolithography process. Herein, a novel method based on spin coating (the polar perovskite precursor solution only infiltrates the hydrophilic pattern area) and low-temperature annealing has been proposed to prepare perovskite arrays, which can solve the problem of incompatibility between polar solvents and perovskite materials. The fabricated photodetector based on CH3NH3PbI3 thin film arrays exhibits good photoelectric performance, with a high detectivity of 4.7 × 10 11 Jones and the responsivity of 0.055 A/W under 530 nm light irradiation. This work provides a simple and effective strategy to prepare well-defined perovskite photodetector arrays based on thin film array.

Key words: ?lm optics, halide perovskite, photodetector arrays, anti-solvent method, hydrophilichydrophobic substrate, photolithography

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