Preparation of black silicon by nanosecond pulsed laser and its optical properties
WANG Ke , , WANG Zilin , ZHOU Xiaoyu , HUANG Weiqi , ZHANG Tiemin , PENG Hongyan , WANG Anchen , ZHANG Xi , HUANG Zhongmei , , LIU Shirong
Chinese Journal of Quantum Electronics
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2024, (5): 813
-821
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DOI: 10.3969/j.issn.1007-5461.2024.05.011