Home
About Journal
Editorial Board
Guide for Authors
Policies & Ethics
Subscription
FAQ
Contact Us
中文
Recent advances in multilayer coatings for EUV lithography
Qin Juanjuan, Dong Weiwei, Zhou Shu, You Libing, Fang Xiaodong
Chinese Journal of Quantum Electronics . 2014, (
1
): 1 -11 .