Crystallization of Amorphous Silicon Films Annealed by Line Shape Excimer Laser Beam
Yin Guangyue1,2,3, You Libing1,3*, Chen Xing1,2,3, Shao Jingzhen1,3, Chen Liang1,2,3, Wang Qingsheng1,3, Fang Xiaodong1,2,3
Chinese Journal of Quantum Electronics
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2019, (2): 219
-225
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