Low loss superconducting coplanar waveguide resonator
based on aluminum film
ZHENG Yuzhen, ZHU Bojie, WU Biao, HUANG Yongdan, CHEN Jian, HUANG Rong, SUN Junyi, JIA Haolin, GU Jun, XIONG Kanglin, ∗, FENG Jiagui, ∗, YANG Hui,
Chinese Journal of Quantum Electronics
.
2021, (4): 428
-435
.
DOI: 10.3969/j.issn.1007-5461.2021.04.004