Performance optimization of AlGaN-based deep ultraviolet laser diode with M-shaped hole barrier structure

ZHANG Aoxiang, WANG Yao, WANG Mengzhen, WEI Shiqin, WANG Fang, LIU Yuhuai,

Chinese Journal of Quantum Electronics . 2022, (4): 583 -590 . DOI: 10.3969/j.issn.1007-5461.2022.04.013