Fabrication of SU-8 microstructure and PDMS concentration gradient generator by moving focal plane front and back exposure

CHEN Qiming , FU Renxuan , XU Yongjun , LIU Yibiao , ZHOU Jinyun , SONG Xianwen

Chinese Journal of Quantum Electronics . 2023, (3): 415 -422 . DOI: 10.3969/j.issn.1007-5461.2023.03.014