量子电子学报 ›› 2023, Vol. 40 ›› Issue (3): 400-406.doi: 10.3969/j.issn.1007-5461.2023.03.012

• 激光技术与器件 • 上一篇    下一篇

单光子探测器制冷系统研究

吕海燕 1,2,3, 洪占勇 1,2,3*, 杜先常 1,2,3   

  1. ( 1 安徽省航空结构件成型制造与装备实验室, 安徽 合肥 230009; 2 合肥工业大学工业与装备技术研究院, 安徽 合肥 230009; 3 科大国盾量子技术股份有限公司, 安徽 合肥 230088 )
  • 收稿日期:2022-02-11 修回日期:2022-03-10 出版日期:2023-05-28 发布日期:2023-05-28
  • 通讯作者: E−mail: hongzhanyong@126.com E-mail:E−mail: hongzhanyong@126.com
  • 作者简介:吕海燕 ( 1995 − ) , 女, 江苏泰州人, 研究生, 主要从事光电检测技术方面的研究。E−mail: 929849974@qq.com
  • 基金资助:
    安徽省重点实验室资助项目 (W2018JSKF0065)

Research on refrigeration system of single−photon detector

LYU Haiyan1,2,3 , HONG Zhanyong1,2,3*, DU Xianchang1,2,3   

  1. ( 1 Anhui Province Key Lab of Aerospace Structural Parts Forming Technology and Equipment, Hefei 230009, China; 2 Institute of Industrial & Equipment Technology, Hefei University of Technology, Hefei 230009, China; 3 QuantumCTek Co., Ltd., Hefei 230088, China )
  • Received:2022-02-11 Revised:2022-03-10 Published:2023-05-28 Online:2023-05-28

摘要: 负反馈雪崩光电二极管是一款单片集成负反馈电阻的砷化镓铟雪崩光电二极管光子计数器件。在基于负 反馈雪崩光电二极管的单光子探测器中, 高灵敏度的制冷系统是保障其正常工作的必备条件。采用被动制冷和主动 制冷相结合的方式, 设计了一套高灵敏度制冷系统。通过理论计算、仿真和实测该制冷系统, 表明该系统内部功耗降 低58.63%, 且在室温25 o C和高温65 o C环境下, 该系统均能使负反馈雪崩光电二极管工作温度控制在 (−20 ± 0.3) o C, 具有环境适应性强、制冷温差大、制冷温度可控等优点。

关键词: 光电子学, 负反馈雪崩光电二极管, 单光子探测器, 半导体制冷

Abstract: Negative feedback avalanche photodiode (NFAD) is an InGaAs avalanche photon diode counting device with monolithic integrated negative feedback resistance. In single photon detector based on NFAD, a high-sensitivity refrigeration system is a necessary condition to ensure its normal operation. Therefore, a set of refrigeration system with high sensitivity has been designed by combing passive and active refrigeration in this paper. Through theoretical calculation, simulation and measurement, it is shown that the internal power consumption of the refrigeration system is reduced by 58.63%. Moreover, at room temperature of 25 o C and high temperature of 65 o C, the system can control the working temperature of negative feedback avalanche photodiode at (−20 ± 0.3) o C, indicating that the designed refrigeration system has the advantages of strong environmental adaptability, large refrigeration temperature difference and controllable refrigeration temperature.

Key words: optoelectronics, negative feedback avalanche photodiode, single-photon detector, semiconductor refrigeration

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