量子电子学报 ›› 2023, Vol. 40 ›› Issue (2): 217-237.doi: 10.3969/j.issn.1007-5461.2023.02.005
红外-太赫兹光电探测器应用及前沿变革趋势
潘晓凯1 , 姜梦杰1,2 , 王 东1,3 , 吕旭阳1,2 , 蓝诗琪 1,2 , 卫英东 1,4 , 何 源1,5 , 郭书广1,3 , 陈平平1 , 王 林1∗ , 陈效双1 , 陆 卫1
- ( 1 中国科学院上海技术物理研究所红外物理国家重点实验室, 上海 200080; 2 东华大学理学院, 上海 201620; 3 上海师范大学数理学院, 上海 200233; 4 上海科技大学物质科学与技术学院, 上海 201210; 5 上海大学微电子学院, 上海 200444 )
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收稿日期:2022-10-08修回日期:2022-11-17出版日期:2023-03-28发布日期:2023-03-28 -
通讯作者:E-mail: wanglin@mail.sitp.ac.cn E-mail:E-mail: wanglin@mail.sitp.ac.cn -
作者简介:潘晓凯 ( 1997 - ), 浙江温州人, 研究生, 主要从事太赫兹探测器件设计与制作方面的研究。 E-mail: pxiaok@163.com -
基金资助:国家重点研发计划重点专项 (2021YFB2800702), 之江实验室开放课题 (2021MB0AB01)
Application and frontier trend of infrared-terahertz photoelectric detector
PAN Xiaokai 1 , JIANG Mengjie 1,2 , WANG Dong 1,3 , LYU Xuyang 1,2 , LAN Shiqi 1,2 , WEI Yingdong 1,4 , HE Yuan 1,5 , GUO Shuguang 1,3 , CHEN Pingping 1 , WANG Lin 1∗ , CHEN Xiaoshuang 1 , LU Wei 1
- ( 1 State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200080, China; 2 College of Science, Donghua University, Shanghai 201620, China; 3 Mathematics & Science College, Shanghai Normal University, Shanghai 200233, China; 4 School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China; 5 School of Microelectronics, Shanghai University, Shanghai 200444, China )
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Received:2022-10-08Revised:2022-11-17Published:2023-03-28Online:2023-03-28
摘要： 自红外辐射被发现以来, 科学家一直在努力将红外技术应用于地球观测、航天遥感和宇宙探索等领域。 目前, 第二、三代红外探测器已进入大规模应用, 高端三代也在逐步突破, 并随着材料制备技术、纳米加工技 术、集成技术和相关交叉学科的发展, 开始出现了具有前瞻性的新材料、新技术和新概念。红外-太赫兹探测器 也开始由单一探测、被动探测和探测分立的传统探测器形式, 逐渐走向多维探测、自主探测和智能化芯片集成 的变革发展方向。在介绍光电探测器物理机制的基础上, 概述了红外-太赫兹探测技术在天文遥感领域的应用与 发展, 重点综述了红外-太赫兹探测器有望出现变革式发展的三大方向, 包括基于人工微结构的光场集成、基于 三维堆叠技术的片上智能化和新型低维材料的应用, 并展望了未来探测器向着超高性能、多维感知、智能化和 感存算一体化的发展趋势。
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引用本文
潘晓凯 , 姜梦杰, , 王 东, , 吕旭阳, , 蓝诗琪 , , 卫英东 , , 何 源, , 郭书广, , 陈平平 , 王 林∗ , 陈效双 , 陆 卫. 红外-太赫兹光电探测器应用及前沿变革趋势[J]. 量子电子学报, 2023, 40(2): 217-237.
PAN Xiaokai , JIANG Mengjie , , WANG Dong , , LYU Xuyang , , LAN Shiqi , , WEI Yingdong , , HE Yuan , , GUO Shuguang , , CHEN Pingping , WANG Lin ∗ , CHEN Xiaoshuang , LU Wei . Application and frontier trend of infrared-terahertz photoelectric detector[J]. Chinese Journal of Quantum Electronics, 2023, 40(2): 217-237.
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