基于微焦点光源的 X 射线椭球聚焦镜设计

doi:10.3969/j.issn.1007-5461.2026.01.003

量子电子学报 ›› 2026, Vol. 43 ›› Issue (1): 38-48.doi: 10.3969/j.issn.1007-5461.2026.01.003

基于微焦点光源的 X 射线椭球聚焦镜设计

黄子文 1, 赵帅 2, 秦东旭 1,陈天赐 1, 杨煜 3, 王克逸 1*

1 中国科学技术大学精密机械与精密仪器系, 安徽合肥 230026;2 中国科学技术大学国家同步辐射实验室, 安徽合肥 230027; 3 合肥工业大学电气与自动化工程学院, 安徽合肥 230009

收稿日期:2024-03-27 修回日期:2024-05-20 出版日期:2026-01-28 发布日期:2026-01-28
通讯作者: E-mail: kywang@ustc.edu.cn E-mail:E-mail: kywang@ustc.edu.cn
作者简介:黄子文 ( 1998 - ), 安徽芜湖人, 研究生, 主要从事X射线光学系统与仪器方面的研究。E-mail: zwhuang@mail.ustc.edu.cn
基金资助:
同步辐射联合基金 (KY2090000080), 安徽省自然科学基金资助项目 (2308085QF208)

Design of X‑ray ellipsoidal focusing mirror based onmicro‑focus light source

HUANG Ziwen 1 , ZHAO Shuai 2 , QIN Dongxu1 , CHEN Tianci 1 , YANG Yu3 , WANG Keyi 1*

1 Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China,Hefei 230026, China; 2 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230027, China; 3 School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China

Received:2024-03-27 Revised:2024-05-20 Published:2026-01-28 Online:2026-01-28

摘要/Abstract

摘要： X射线椭球聚焦镜是显微成像、微束衍射、同步辐射光源等系统的关键器件。基于滨松L9421-02型微焦点光源, 开展了适用于桌面级X射线仪器的椭球聚焦镜的设计研究。选择8 keV作为设计能量, 根据反射与聚焦特性、制造工艺等条件, 分析了椭球镜的尺寸范围与设计要求, 并提出了基于参数扫描的尺寸设计流程。进而运用等效界面法, 研究了光学薄膜系统的X射线反射率, 确定了反射面膜层结构。最终提出了两组单层金膜椭球镜与两组钨-硅多层膜椭球镜的最优设计方案, 其长度为50 mm, 直径尺寸范围为2~10 mm。尺寸与膜层设计是椭球镜制造、检测与仪器开发等工作的前序基础, 完整的设计思路对于椭球镜个性化定制也具有一定的参考价值。

关键词: 基础光学, X射线, 旋转椭球聚焦镜, 光学设计, 掠入射系统, X射线反射率

Abstract: X-ray ellipsoidal focusing mirror is a key device in systems such as microscopic imaging, microbeam diffraction, synchrotron radiation light source, and so on. Based on Hamamatsu L9421-02 micro-focus light source, an ellipsoidal focusing mirror suitable for table-level X-ray instruments is designed in this work. 8 keV is selected as the design energy for the mirror. According to the characteristics of reflection, focusing and manufacturing process, the size range and design requirements of the ellipsoidal mirror are analyzed, and a dimension design flow based on parameter scanning is proposed. Then, by using the equivalent interface method, the X-ray reflectivity of the optical thin film system is studied for the ellipsoidal mirror, and the structure of the reflecting film is determined. Finally, the optimal design schemes of two groups of single-layer gold film ellipsoidal mirrors and two groups of tungsten-silicon multilayer film ellipsoidal mirrors are proposed, with a length of 50 mm and a diameter of about 2–10 mm. The design of the size and the films is the prerequisite for the manufacturing, testing and instrument development of ellipsoidal mirrors, and the complete design idea also offers valuable reference for the personalized customization of ellipsoidal mirrors.

Key words: basic optics, X-ray, rotating ellipsoidal focusing mirror, optical design, grazing incidence system, X-ray reflectivity

中图分类号:

O434.1

黄子文, 赵帅, 秦东旭, 陈天赐, 杨煜, 王克逸 . 基于微焦点光源的 X 射线椭球聚焦镜设计[J]. 量子电子学报, 2026, 43(1): 38-48.

HUANG Ziwen , ZHAO Shuai , QIN Dongxu , CHEN Tianci , YANG Yu , WANG Keyi . Design of X‑ray ellipsoidal focusing mirror based onmicro‑focus light source[J]. Chinese Journal of Quantum Electronics, 2026, 43(1): 38-48.

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基于微焦点光源的 X 射线椭球聚焦镜设计

Design of X‑ray ellipsoidal focusing mirror based onmicro‑focus light source

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