用于刻写FBG的小型准分子激光器实验研究*

量子电子学报

用于刻写FBG的小型准分子激光器实验研究*

张威1，方晓东1,2，梁勖1,2

1中国科学院安徽光学精密机械研究所，安徽合肥 230031； 2安徽省光子器件与材料重点实验室，安徽合肥 230031

出版日期:2018-03-28 发布日期:2019-06-11
通讯作者: 方晓东( 1963 - ), 安徽人,博士,研究员,博士生导师,主要从事半导体薄膜材料和器件以及准分子激光技术及应用方面的研究。 E-mail: xdfang@aiofm.ac.cn
作者简介:张威( 1980 - ), 女,辽宁人,博士生,从事准分子激光技术研究。 E-mail: jiaxuan@mail.ustc.edu.cn
基金资助:
Supported by National Natural Science Foundation of China (国家自然科学基金, 61307112)

Experiment research of compact excimer laser for writing FBG

Zhang Wei1, Fang Xiaodong1,2, Liang Xu1,2

Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China

Published:2018-03-28 Online:2019-06-11

摘要/Abstract

摘要： 248 nm的KrF准分子激光是光纤布拉格光栅(FBG)的首选刻蚀光源。针对FBG的刻写要求，研制了一台小型化KrF准分子激光器，并进行了机械结构设计和改进。实验研究了充电电压、放电电容、工作气体配比和储气腔内的气体压力对输出激光能量和效率的影响，优化了激光器性能，输出的重复频率达200 Hz，单脉冲输出能量达16 mJ，能量不稳定度小于2%，输出窗口附近的近场光斑尺寸为6 mm×3 mm，最高输出效率为1.24%。用该激光器采用相位掩模法进行了刻写FBG的实验，效果良好。

关键词: 准分子激光, 光纤布拉格光栅, 相位掩模, 小型化

Abstract: 248 nm KrF excimer laser is the preferred choice for writing fiber Bragg grating (FBG). A miniaturized KrF excimer laser is developed according to the requirements of FBG writing, and the mechanical structure design and improvement are also carried out. The output laser energy and efficiency dependent on the charging voltage, discharge capacitance, components of mixed gas and gas pressure in storage cavity are investigated experimentally. The laser’s performance is optimized. The output repetition rate reaches 200 Hz, and the single-pulse output energy is up to 16 mJ. The energy instability is less than 2%, and the near-field spot dimensions are 6 mm×3 mm near the output window. The maximal output efficiency is 1.24%. The experiment to write FBG by using phase-mask method is carried out with the laser, and the effect is good.

Key words: excimer laser, fiber Bragg grating, phase-mask, miniaturization

张威1，方晓东1,2，梁勖1,2. 用于刻写FBG的小型准分子激光器实验研究*[J]. 量子电子学报.

Zhang Wei1, Fang Xiaodong1,2, Liang Xu1,2. Experiment research of compact excimer laser for writing FBG[J]. Chinese Journal of Quantum Electronics.

参考文献

[ ] He Q, Wang X. Time-frequency manifold for demodulation with application to gearbox fault detection[C]. IEEE Conference on Prognostics & System Health Management, 2012: 1-6. [ ] Yu Yinshan, You Libing, Liang Xu, et al. Progress of excimer lasers technology[J]. Chinese J Lasers (中国激光), 2010, 37(9): 2253-2270 (in Chinese). [ ] Saito T, Ito S, Tada A. Long lifetime operation of an ArF-excimer laser[J]. Applied Physics B, 1996, 63(3): 229-235. [ ] Chang T Y. Improved uniform‐field electrode profiles for TEA laser and high‐voltage applications[J]. Review of Scientific Instruments, 1973, 44(4): 405-407. [ ] Anufrik S S, Volodenkov A P, Znosko K F. Influence of the preionization system on the lasing energy of a XeCl laser[J]. J. Opt. Technol., 2000, 67(11): 961-967. [ ] You Libing, Liang Xu, Yu Yinshan, Design and experimental study of an excimer laser based on solid state pulsed power module[J]. Chinese J Lasers(中国激光), 2010, 37( 2) : 370 -373(in Chinese). [ ] Kushner M J. Microarcs as a termination mechanism of optical pulses in electric-discharge excited KrF excimer lasers[J]. IEEE Transactions on Plasma Science, 1991, 19(2): 387-399. [ ] Bagayev S N, Razhev A M, Zhupikov A A, et al. 1.3 J KrF excimer laser with efficiency 2.5% [C]. SPIE, 2003, 5120: 231-235. [ ] Fahlen T. Efficient quarter-joule KrF laser with corona preionization[J]. IEEE Journal of Quantum Electronics (量子电子学报), 1979, 15(5): 311-313(in Chinese). [ ] Sze R C. Improved lasing performance of XeCl using Ar and Ne diluents[J]. Journal of Applied Physics, 1979, 50(7): 4596-4598. [ ] Qiu Hongsong , You Libing , Wang Qingsheng, et al. Optimizing performance of KrF excimer laser by modifying active medium gas partial pressures[J]. Chinese Journal of Quantum Electronics (量子电子学报), 2016, 33(3): 296-300(in Chinese). [ ] Liu Jingru, Yi Aiping, Hu Zhiyun, et al. Excimer Laser Technology and Applications (准分子激光技术及应用)[M]. Beijing: National Defense Industry Press, 2009: 75-78(in Chinese). [ ] Zhang Wei, Liang Xu, Tao Ruhua, et al. Research of compact excimer laser for producing FBG[J]. Infrared and Laser Engineering(红外与激光工程), 2016, 45(1): 0105001(in Chinese).

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