紫外超短脉冲的准分子激光放大技术

doi:10.3969/j.issn.1007-5461.2022.05.001

量子电子学报 ›› 2022, Vol. 39 ›› Issue (5): 677-686.doi: 10.3969/j.issn.1007-5461.2022.05.001

• 综述 • 下一篇

紫外超短脉冲的准分子激光放大技术

张艳琳1,2,5 , 游利兵1,3,5∗ , 王宏伟1 , 王琪4 , 胡泽雄1,2 , 范军1,2 , 方晓东1,2

( 1 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 安徽省光子器件与材料重点实验室, 安徽合肥 230031; 2 中国科学技术大学, 安徽合肥 230026; 3 深圳技术大学新材料与新能源学院, 广东深圳 518118; 4 合肥工业大学电子科学与应用物理学院, 安徽合肥 230009; 5 深圳盛方科技有限公司, 广东深圳 518173 )

收稿日期:2021-02-08 修回日期:2021-03-05 出版日期:2022-09-28 发布日期:2022-09-28
通讯作者: E-mail: youlibing@sztu.edu.cn E-mail:youlibing@sztu.edu.cn
作者简介:张艳琳 ( 1996 - ), 女, 山西忻州人, 研究生, 主要从事紫外超短脉冲的放大和参量测量方面的研究。 E-mail: yanlinz@mail.ustc.edu.cn
基金资助:
Supported by National Natural Science Foundation of China (国家自然科学基金, 41627803), Major Research and Development Program of Anhui Province of China (安徽省重点研究和开发计划项目, 1804a0802219), Science and Technology Plan of Shenzhen (深圳市科技计划资助项目, KQTD20170331115422184)

Excimer laser ampliﬁcation technology of ultraviolet ultrashort pulse

ZHANG Yanlin 1,2,5 , YOU Libing 1,3,5∗ , WANG Hongwei 1 , WANG Qi 4 , HU Zexiong 1,2 , FAN Jun 1,2 , FANG Xiaodong 1,2

( 1 Anhui Provincial Key Laboratory of Photonic Devices and Materials, Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China; 2 University of Science and Technology of China, Hefei 230026, China; 3 College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China; 4 School of Electronic and Applied Physics, Hefei University of Technology, Hefei 230009, China; 5 Shenzhen Shengfang Technology Limited Company, Shenzhen 518173, China )

Received:2021-02-08 Revised:2021-03-05 Published:2022-09-28 Online:2022-09-28

摘要/Abstract

摘要： 由于具有波长短、聚焦特性好、峰值功率高等优势, 紫外超短脉冲在超快科学、强场物理等领域具有重要的应用价值。准分子激光工作气体作为增益介质在放大紫外超短脉冲方面具有独特的优势, 利用准分子激光放大紫外超短脉冲获得高强度的激光输出为紫外激光的应用提供了新的可能性。概括介绍了准分子激光放大的特点, 进而基于准分子的放大特性分单元介绍了紫外超短准分子激光放大技术, 并对深紫外超短脉冲脉宽的测量进行了简单阐述。

关键词: 激光技术, 紫外超短脉冲, 准分子激光放大, 脉宽测量

Abstract: Ultraviolet ultrashort pulses have important application value in the ﬁelds of ultrafast science and strong ﬁeld physics due to their short wavelength, excellent focusing characteristics, and high peak power. Excimer laser gas as gain medium has unique advantages in amplifying ultraviolet ultrashort pulses, so using excimer lasers to amplify ultraviolet ultrashort pulses to obtain high-intensity laser output provides a new possibility for the application of ultraviolet lasers. This article introduces the features of excimer laser ampliﬁcation brieﬂy ﬁrstly, then describes the ultraviolet ultrashort excimer laser technology in units based on the ampliﬁcation characteristics of excimer, and at last describes the measurement of deep ultraviolet ultrashort pulse duration as well.

Key words: laser technique, ultrashort ultraviolet pulse, excimer laser ampli?cation, pulse duration measurement

中图分类号:

TN248

张艳琳, 游利兵, ∗, 王宏伟, 王琪, 胡泽雄, 范军, 方晓东, . 紫外超短脉冲的准分子激光放大技术[J]. 量子电子学报, 2022, 39(5): 677-686.

ZHANG Yanlin , , YOU Libing , ∗ , WANG Hongwei , WANG Qi , HU Zexiong , , FAN Jun , , FANG Xiaodong , . Excimer laser ampliﬁcation technology of ultraviolet ultrashort pulse[J]. Chinese Journal of Quantum Electronics, 2022, 39(5): 677-686.

参考文献

[1] Yanovsky V P, Chvykov V, Kalinchenko G, et al. Ultra-high intensity- 300-TW laser at 0.1 Hz repetition rate[J]. Optics Express, 2008, 16(3):2109-2114.
[2] Tomov I V, Fedosejevs R，Richardson M C, et al. Picosecond gain and saturation measurements of the 353‐nm XeF laser line[J]. Applied Physics Letters, 1977, 31(11):747-749.
[3] He Liwen, Fang Xiaodong. Progress of application of excimer laser micromecining [J].Chinese Journal of Quantum Electronics,2018,35(06):641-648(in Chinese).
何立文,方晓东.准分子激光微加工应用研究进展[J].量子电子学报,2018,35(06):641-648.
[4] Nishizawa, N. Ultrashort pulse fiber lasers and their applications[J]. Japanese Journal of Applied Physics, 2014, 53(9):090101.
[5] S. Szatmári. High-brightness ultraviolet excimer lasers[J]. Applied Physics B, 1994, 58(3):211-223.
[6] Glownia J H, Kaschke M, Sorokin P P. Amplification of 193-nm femtosecond seed pulses generated by third-order, nonresonant, difference-frequency mixing in xenon[J]. Optics Letters, 1992, 17(5):337-9.
[7] Mcintyre I A, Rhodes C K. High power ultrafast excimer lasers[J]. Journal of Applied Physics, 1991, 69(1):R1-R19.
[8] Wang Zhao, Zhang ji, Li Jing, et al. Amplification and beam combination of ultra-short KrF laser pulse[J].High Power Laser and Particle Beams, 2020,32(1):81-84(in Chinese).
王钊,张骥,李静, 等.氟化氪短脉冲激光的放大和组束研究[J].强激光与粒子束,2020,32(1):81-84.
[9] Tang Xiuzhang. Study on the ultraviolet ultrashort pulse amplification by KrF excimer laser[D].Beijing: Doctorial
Dissertation of China institute of atomic energy,2001(in Chinese).
汤秀章. KrF准分子激光器放大紫外超短脉冲的研究[D]. 中国原子能科学研究院, 2001.
[10] Zhou Hui. Study on the generation of UV and VUV ultrashort pulses and the applications[D]. Shanghai: Doctorial
Dissertation of East China Normal University, 2014(in Chinese).
周慧. 紫外与真空紫外超短脉冲的产生及应用[D]. 华东师范大学, 2014.
[11] Glownia J H, Arjavalingam G, Sorokin P P, et al. Amplification of 350-fsec pulses in XeCl excimer gain modules[J]. Optics Letters, 1986, 11(2):79.
[12] Szatmári S, Rácz B, Sch?ffer P F, et al. Bandwidth limited amplification of 220 fs pulses in XeCl[J]. Optics Communications, 1987,62(4),271-276.
[13] Hofinann T, Mossavi K, Tittel F K, et al. Spectrally compensated sum-frequency mixing scheme for generation of broadband radiation at 193 nm[J]. Optics Letters, 1992, 17(23):1691.
[14] Stamm U, Kleinschmidt J, Voss F, et al. High repetition rate amplification of femtosecond pulses in the ultraviolet spectral range[J]. 1995.
[15] Nabekawa Y, Sajiki K, Yoshitomi D, et al. High-repetition-rate high-average-power 300-fs KrF/Ti:sapphire hybrid laser[J]. Optics Letters, 1996, 21(9):647-649.
[16] Sadovskii S P, Chizhov P A, Bukin V V, et al. Picosecond laser system with a wavelength of 193nm based on a solid-state Nd:YAG laser, parametric oscillator, and ArF amplifier[J]. Physics of Wave Phenomena, 2014, 22(4):223-226.
[17] Kannari F, Obara M. Characteristics of amplification of ultrashort laser pulses in excimer media[C].Intl Symp on Gas Flow & Chemical Lasers. International Society for Optics and Photonics, 1991.
[18] Momma C, Eichmann H, Jacobs H, et al. Short-pulse amplification and gain dynamics of an ArF excimer amplifier[J]. Optics Letters, 1993, 18(7):516-518.
[19] Mossavi K, Hofmann T, G Szabó, et al. Femtosecond gain characteristics of the discharge-pumped ArF excimer amplifier[J]. Optics Letters, 1993, 18(6):435-437.
[20] Mossavi K, Hofmann T, Tittel F K, et al. Ultrahigh-brightness, femtosecond ArF excimer laser system[J]. Applied Physics Letters, 1993, 62(11):1203-1205.
[21] Nabekawa Y, Yoshitomi D, Sekikawa T, et al. High-average-power femtosecond KrF excimer laser[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2001, 7(4):551-558.
[22] Dadap J I, Focht G B, Reitze D H, et al. Two-photon absorption in diamond and its application to ultraviolet femtosecond pulse-width measurement[J]. Optics Letters, 1991, 16(7):499-501.
[23] Omenetto F G, Schroeder W A, Boyer K, et al. Measurement of 160-fs, 248-nm pulses by two-photon fluorescence in fused-silica crystals[J]. Applied Opicst, 1997, 36(15):3421-3424.
[24] Dai Xiaomin. Study on the measurement of UV femtosecond laser pulse duration[D]. Shanghai: Master’s Dissertation of East China Normal University, 2014(in Chinese). 戴小民.紫外飞秒激光脉冲宽度测量的研究[D].华东师范大学，2010
[25] Marcus, Beutler, Masood, et al. Generation of sub-50-fs vacuum ultraviolet pulses by four-wave mixing in argon[J]. Optics Letters, 2010, 35(9):1491-1493.
[26] Xu Yong-sheng, Zhang Ji, Zhang Haifeng, et al. Study on ultraviolet single shot autocorrelator based on transient grating diffraction[J]. Atomic Energy Sciende and Technology,2017, 51(3): 567-571(in Chinese). 徐永生，张骥，张海峰等. 瞬态光栅衍射法紫外单次自相关仪的研究[J]. 原子能科学技术, 2017, 51(3): 567-571.
[27] Miyazaki K, Fukatsu T, Yamashita I, et al. Output and picosecond amplification characteristics of an efficient and high-power discharge excimer laser[J]. Applied Physics B, 1991, 52(1):1-7.
[28] S. Szatmári, G. Almási, Simon P. Off-axis amplification scheme for short-pulse amplifiers[J]. Applied Physics B, 1991, 53(2):82-87.
[29] Mossavi K, Hofmann T, Tittel F K, et al. Ultrahigh-brightness, femtosecond ArF excimer laser system[J]. Applied Physics Letters, 1993, 62(11):1203-1205.
[30] Slattery S A, Nikogosyan D N. Two-photon absorption at 211 nm in fused silica, crystalline quartz and some alkali halides[J]. Optics Communications, 2003, 228(1-3):127-131.
[31] Dragonmir A, Mcinerney J G, Nikogosyan D N. Femtosecond measurements of two-photon absorption coefficients at lambda = 264 nm in glasses, crystals, and liquids[J]. Applied Optics, 2002, 41(21):4365-4376.
[32] Patankar S, Yang S T, Moody J D, et al. Two-photon absorption measurements of deep UV transmissible materials at 213nm[J]. Applied Optics, 2017, 56(30):8309-8312.
[33] Kittelmann O, Ringling J. Intensity-dependent transmission properties of window materials at 193-nm irradiation[J]. Optics Letters, 1994, 19(24):2053-2055.
[34] Taylor A J, Gibson R B, Roberts J P. Two-photon absorption at 248 nm in ultraviolet window materials[J]. Optics Letters, 1988, 13(10):814-816.

紫外超短脉冲的准分子激光放大技术

Excimer laser ampliﬁcation technology of ultraviolet ultrashort pulse

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价

[1]	张艳琳, 游利兵, 王宏伟, 王琪, 胡泽雄, 范军, 方晓东, . 深紫外飞秒激光脉宽测量[J]. 量子电子学报, 2023, 40(4): 469-475.
[2]	张震, 段典, 陈雨君, 魏珊珊, 马金栋, 姚波, 毛庆和 . 基于窄带耗散孤子Figure-9 光纤振荡器和单级单模光纤放大器的皮秒脉冲光纤前端[J]. 量子电子学报, 2023, 40(4): 476-482.
[3]	唐敬玲, 齐月, 白振旭, 齐瑶瑶, 丁洁, 颜秉政, 王雨雷, 吕志伟, . 基于YAG/Nd: YAG/Cr4+: YAG 键合晶体的被动调Q亚纳秒激光器[J]. 量子电子学报, 2023, 40(4): 483-491.
[4]	王长, ∗ , 宋高辉, , 谭智勇, , 曹俊诚, ∗. 基于半导体光子学器件的太赫兹成像技术研究进展 (封面文章}[J]. 量子电子学报, 2023, 40(2): 181-192.
[5]	陈雨君姚波刘昊炜魏珊珊毛庆和. 基于石英玻璃掺铥光纤的单纵模 DBR 光纤激光器的研制[J]. 量子电子学报, 2023, 40(1): 56-61.
[6]	魏士钦王瑶王梦真王芳刘俊杰刘玉怀. 基于阱式阶梯电子阻挡层的深紫外激光二极管性能研究[J]. 量子电子学报, 2023, 40(1): 62-68.
[7]	胡泽雄, 游利兵, ∗, 寸超, 王宏伟, 范军, 王琪, 张艳琳, 方晓东. 准分子激光低抖动延时同步系统[J]. 量子电子学报, 2023, 40(1): 69-78.
[8]	钟玉龙, 程庭清∗. LD 侧面泵浦 Tm:YAG 电光调 Q 激光的实验研究[J]. 量子电子学报, 2022, 39(5): 736-741.
[9]	张超, 韩亚帅, 周正仙, 屈军∗. 扭曲厄米-高斯-谢尔模光束对两种瑞利粒子的捕获[J]. 量子电子学报, 2022, 39(5): 742-751.
[10]	张瑞, 梅大江, ∗, 石小兔, 马荣国, 张庆礼, ∗, 窦仁勤, 刘文鹏, . YAG 晶体的位错研究进展[J]. 量子电子学报, 2022, 39(5): 687-706.
[11]	杨浩, 滕浩, ∗, 吕仁冲, 朱江峰∗, 魏志义, . 基于同心展宽器的飞秒啁啾脉冲放大研究[J]. 量子电子学报, 2022, 39(4): 566-573.
[12]	康仁铸, 吕仁冲, 滕浩, 朱江峰, 魏志义, . 基于改进的Frantz-Nodvik 方程的 Yb: KGW 再生放大器研究[J]. 量子电子学报, 2022, 39(4): 574-582.
[13]	张傲翔, 王瑶, 王梦真, 魏士钦, 王芳, 刘玉怀, . 具有M 形空穴阻挡层结构的AlGaN 基深紫外激光二极管性能优化[J]. 量子电子学报, 2022, 39(4): 583-590.
[14]	李晨睿, 李香乐, 应佳峻, 吴怡童, 盛雨齐, 周勇, 高伟清. 无拍频1570 nm 光纤激光器及其在 2 m 波段激光产生中的应用[J]. 量子电子学报, 2022, 39(4): 591-597.
[15]	徐水秀, 喻子彧, 覃淮青, 莫爵徽, 卢志民, 董美蓉, 陆继东, 姚顺春, ∗. 基于激光诱导击穿光谱的煤质快速分析研究及应用[J]. 量子电子学报, 2021, 38(6): 727-750.