基于Smith预估补偿的准分子激光器温度控制系统研究

J4 ›› 2018, Vol. 35 ›› Issue (5): 533-538.

基于Smith预估补偿的准分子激光器温度控制系统研究

朱成林1,2,3，韩晓泉1,2，冯泽斌1,2，胡明庆4

1中国科学院光电研究院光电工程部，北京 100094; 2北京市准分子激光工程技术研究中心，北京 100094; 3中国科学院大学材料科学与光电技术学院，北京 100190; 4熊猫电子集团有限公司，江苏南京 210007

收稿日期:2017-06-19 修回日期:2017-09-16 出版日期:2018-09-28 发布日期:2018-09-29
通讯作者: 韩晓泉（1978- ），博士，副研究员，主要从事光电检测和精密测控技术方面的研究。 E-mail: hanxiaoquan@aoe.ac.cn
基金资助:
Supported by National Science and Technology Major Project NO. Two（国家科技重大专项02专项，2013ZX02202

Temperature control system of excimer laser based on Smith prediction compensation

ZHU Chenglin1,2,3，HAN Xiaoquan1,2， FENG Zebin1,2， HU Mingqing4

1 Opto-Electronics Engineering Department, Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China; 2 Excimer Laser Engineering Technology Research Center of Beijing, Beijing 100094, China; 3 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100190, China; 4 Panda Electronics Incorporated Company, Nanjing 210007, China

Received:2017-06-19 Revised:2017-09-16 Published:2018-09-28 Online:2018-09-29

摘要/Abstract

摘要：

针对准分子激光器温度控制系统的大时间滞后特点，利用MATLAB对准分子激光器温度控制系统进行模型辨识，设计了一种新型Smith-PID预估复合控制器。在此基础上分别对两种控制器进行仿真和实验。结果表明与常规PID控制器相比，Smith-PID预估复合控制器超调量减少41%，调节时间减少51%。所设计控制器具有稳健性强、超调量小及调节时间短等优点，可为准分子激光器的运行提供良好的温度控制环境。

关键词: 激光技术；温度控制；Smith预估补偿；准分子激光器

Abstract:

Aiming at the large time delay characteristics of excimer laser temperature control system, the model identification of excimer laser temperature control system is carried out using MATLAB, and a new Smith-PID prediction compound controller is designed. On this basis, two kinds of controllers are simulated and experimented respectively. Results show that compared with the conventional PID controllers, the overshoot of Smith-PID compound prediction controller is reduced by 41% and the adjustment time is reduced by 51%. The designed controller has the advantages of strong robustness, small overshoot and short adjusting time, which can provide a favorable temperature control environment for the operation of excimer lasers.

Key words: laser techniques; temperature control; Smith prediction compensation; excimer laser

中图分类号:

TP273

朱成林韩晓泉冯泽斌胡明庆. 基于Smith预估补偿的准分子激光器温度控制系统研究[J]. J4, 2018, 35(5): 533-538.

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