基于连续波腔衰荡光谱的CO2气体分析装置研制

doi:10.3969/j.issn.1007-5461.2021.05.007

量子电子学报 ›› 2021, Vol. 38 ›› Issue (5): 633-640.doi: 10.3969/j.issn.1007-5461.2021.05.007

• “激光光谱新技术与应用”专辑 • 上一篇下一篇

基于连续波腔衰荡光谱的CO₂气体分析装置研制

马维光1,3, 周晓彬1,3, 曹振松2, 许非1,3, 田建飞1,3, 周月婷1,3, 刘建鑫1,3, 赵刚1,3∗

1 山西大学激光光谱研究所量子光学与光量子器件国家重点实验室, 山西太原 030006; 2 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 中国科学院大气光学重点实验室, 安徽合肥 230031; 3 山西大学极端光学协同创新中心, 山西太原 030006

收稿日期:2021-04-02 修回日期:2021-06-28 出版日期:2021-09-28 发布日期:2021-09-28
通讯作者: E-mail: gangzhao@sxu.edu.cn E-mail:gangzhao@sxu.edu.cn
作者简介:马维光 ( 1976 - ), 山西大同人, 博士, 教授, 博士生导师, 主要从事超灵敏激光光谱技术方面的研究。 E-mail: mwg@sxu.edu.cn
基金资助:
Supported by General Program of National Natural Science Foundation of China (国家自然科学基金, 61875107, 61905136, 61905134), Open Research Fund of Key Laboratory of Atmospheric Optics, Chinese Academy of Sciences (中国科学院大气光学重点实验室开放课题基金, JJ-2018-02)

Development of CO₂ gas analyzer based on continuous wave cavity ring-down spectroscopy

MA Weiguang1,3, ZHOU Xiaobin1,3, CAO Zhensong2, XU Fei1,3, TIAN Jianfei1,3, ZHOU Yueting1,3, LIU Jianxin1,3, ZHAO Gang1,3∗

1 State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China; 2 Key Laboratory of Atmospheric Optics, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China; 3 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China

Received:2021-04-02 Revised:2021-06-28 Published:2021-09-28 Online:2021-09-28

摘要/Abstract

摘要： 连续波腔衰荡光谱技术 (CW-CRDS) 可以实现对痕量气体的高灵敏检测。基于 (CW-CRDS), 采用近红外分布反馈式二极管激光器 (DFB-DL) 和半导体光放大器 (SOA), 使用自主设计的高精细度 Fabry– Perot ´ 腔、激光驱动器、阈值检测电路, 实现了紧凑型气体分析装置的设计。其中 SOA 在放大激光功率、提升衰荡信号信噪比的同时, 还作为光开关, 用于触发衰荡事件。整个系统集成在一个 700 mm × 300 mm × 185 mm 的定制机箱中, 基于该装置测量了位于 6359.97 cm−1 处的 CO2 气体, 对空腔衰荡的时间序列分析结果显示系统的探测极限为 3.85×10−8 cm−1。

关键词: 光谱学, 气体分析装置, 腔衰荡光谱, CO2 气体检测, 分布反馈式二极管激光器

Abstract: Continuous wave cavity ring-down spectroscopy (CW-CRDS) can be utilized in high sensitive trace gas detection. Based on CW-CRDS, using near-infrared distributed feedback diode laser (DFB-DL), semiconductor optical amplifier (SOA), and self-designed high-finesse Fabry-Perot cavity, laser driver and threshold detection circuit, the compact design of trace gas analyzer have been realized. In the system, SOA not only amplifies the laser power and improves the signal-to-noise ratio of ring-down signal, but also acts as an optical switch to trigger the ring-down time. The whole system is integrated in a 700 mm × 300 mm × 185 mm customized cabinet. Based on this device, CO2 gas is measured at 6359.97 cm−1, and the time series analysis results of the empty cavity ring-down time shows that the detection limit of the system is 3.85×10−8 cm−1.

Key words: spectroscopy, gas analyzer, cavity ring-down spectroscopy, CO2 gas detection, distributed feedback diode laser

中图分类号:

O433.4

马维光周晓彬许非田建飞周月婷刘建鑫赵刚. 基于连续波腔衰荡光谱的CO₂气体分析装置研制[J]. 量子电子学报, 2021, 38(5): 633-640.

MA Weiguang, ZHOU Xiaobin, CAO Zhensong, XU Fei, TIAN Jianfei, ZHOU Yueting, LIU Jianxin, ZHAO Gang, ∗. Development of CO₂ gas analyzer based on continuous wave cavity ring-down spectroscopy[J]. Chinese Journal of Quantum Electronics, 2021, 38(5): 633-640.

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基于连续波腔衰荡光谱的CO₂气体分析装置研制

Development of CO₂ gas analyzer based on continuous wave cavity ring-down spectroscopy

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