量子电子学报 ›› 2024, Vol. 41 ›› Issue (4): 578-586.doi: 10.3969/j.issn.1007-5461.2024.04.002

• 光谱 • 上一篇    下一篇

基于柱面聚焦透镜的激光诱导击穿光谱特性研究

符小清1, 王静鸽1*, 代 博1, 梁方圆1, 刘佳鑫2   

  1. ( 1 河南科技大学物理工程学院, 河南 洛阳 471023; 2 中国人民解放军第五七一五工厂, 河南 洛阳 471000 )
  • 收稿日期:2023-05-23 修回日期:2023-06-15 出版日期:2024-07-28 发布日期:2024-07-28
  • 作者简介:符小清(1996 - ), 女, 研究生, 主要从事激光诱导等离子体物理特性方面的研究。E-mail: fuxq16124x@126.com
  • 基金资助:
    国家自然科学基金 (11504091) , 河南省高等学校重点科研项目 (22A140018)

Study on Spectral Characteristics of Laser Induced Breakdown Based on Cylindrical Focusing Lens

FU Xiaoqing1 , WANG Jingge 1*, DAI Bo1 , LIANG Fangyuan1 , LIU Jiaxin2   

  1. (1 School of Physics and Engineering, Henan University of Science and Technology, Luoyang 471023, China; 2 No.5715 Factory, People's Liberation Army, Luoyang 471000, China)
  • Received:2023-05-23 Revised:2023-06-15 Published:2024-07-28 Online:2024-07-28
  • Contact: E-mail: wangjingge1987@126.com E-mail: E-mail: wangjingge1987@126.com

摘要: 由于高斯脉冲激光束强度分布不均匀, 导致传统激光诱导击穿光谱 (LIBS) 系统光谱信号稳定性差, 且对微 量元素检测灵敏度较低。为了提高LIBS技术的分析性能, 本研究采用球面透镜和柱面透镜相结合的方法对激光束 进行聚焦, 激发合金钢样品产生等离子体。研究结果表明通过在实验系统中加入柱面聚焦透镜形成了更均匀的烧蚀 坑形貌, 一定程度上规避了传统系统中高斯光束激发所形成的“尖锥形”烧蚀坑对光谱信号的不利影响, 获得了更加 稳定的等离子体辐射光谱, 特征谱线强度和背景强度信号稳定性分别提高了24.7%~36.67%和43.75%~57.7%, 等离 子体温度和电子密度的稳定性提高了~10%。进一步采用内标法对合金钢中的Mn、Cr、Ni三种微量元素进行了定量 分析, 结果表明采用柱面透镜聚焦提高了元素的检测灵敏度, 元素的检出限 (LOD) 降低了1.15~3.01倍。

关键词: 光谱学, 激光诱导击穿光谱, 柱面聚焦透镜, 信号稳定性, 定量分析, 合金钢

Abstract: Due to the uneven intensity distribution of Gaussian pulsed laser beam, traditional laserinduced breakdown spectroscopy (LIBS) system has poor spectral signal stability, and the detection sensitivity for trace elements is low. To improve the analytical performance of LIBS, a combination of spherical lens and cylindrical lens is used to focus the laser beam to ablate the alloy steel sample to generate plasma in this study. The research results show that a more uniform ablation crater morphology is formed by adding a cylindrical focusing lens to the experimental system, which to some extent avoids the adverse influence of the "pointed conical" ablation crater formed by Gaussian beam excitation on the spectral signal in traditional systems, and a more stable plasma radiation spectrum is obtained. Compared with the traditional LIBS, the signal stability of characteristic spectral line intensity and background intensity in this work has increased by 24.7%-36.67% and 43.75%-57.7% respectively, and the stability of plasma temperature and electron density has increased by ~10%. Furthermore, three trace elements, Mn, Cr and Ni, in alloy steel are quantitatively analyzed using the internal standard method. The result shows that the use of cylindrical lens focusing improves the detection sensitivity of elements, and the limit of detection (LOD) of elements is reduced by 1.15-3.01 times.

Key words: spectroscopy, laser-induced breakdown spectroscopy, cylindrical focusing lens, signal stability, quantitative analysis, steel alloy

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