关键词: 光谱学, 激光诱导击穿光谱, 紧凑型LIBS光谱仪, 定量分析, 参数优化

Abstract: Based on the demand for laser-induced breakdown spectroscopy (LIBS) technology in various fields such as coal analysis, metallurgy and water quality testing, a compact rapid detection device is developed based on the principle of laser-induced breakdown spectroscopy. The developed LIBS spectrometer has good stability and high laser energy (0-100 mJ), and can perform fully automated spectral line comparison and selection for quantitative analysis, thus facilitating rapid LIBS detection of multiple samples and elements. On the basis of parameter optimization, the device was used to detect and analyze the silicon and carbon elements contained in 7 steel samples. Experimental results show that the optimal silicon and carbon characteristic spectral data can be obtained with a delay time of 1 μs, defocus amount of 0 mm, and laser energy of 60 mJ. Under the optimal experimental conditions, quantitative analysis of the seven samples was conducted, and calibration fitting curves for silicon and carbon elements were established using the internal standard method, yielding correlation coefficients of 0.986 and 0.999, respectively. The relative standard error of the relative intensity ratio does not exceed 5%, and the predicted values are close to the actual values. The results in this work validate the excellent analytical performance of the instrument, which is of great significance for the development of multi-element detection and portable LIBS instruments.

Key words: spectroscopy, laser-induced breakdown spectroscopy, compact LIBS spectrometer, quantitative analysis, parameter optimization