基于高精密腔的高灵敏臭氧探测技术研究

doi:10.3969/j.issn.1007-5461.2025.03.010

量子电子学报 ›› 2025, Vol. 42 ›› Issue (3): 381-390.doi: 10.3969/j.issn.1007-5461.2025.03.010

基于高精密腔的高灵敏臭氧探测技术研究

刘孟辉 1,2, 童金钊 1,2, 林川 1,2, 黄晨光 3*, 谢品华 1,2*

1 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 安徽合肥 230031; 2 中国科学技术大学, 安徽合肥 230026; 3 中国科学院大学, 北京 100049

收稿日期:2023-10-08 修回日期:2023-10-30 出版日期:2025-05-28 发布日期:2025-05-28
通讯作者: E-mail: huangcg@imech.ac.cn; phxie@aiofm.ac.cn E-mail:E-mail: huangcg@imech.ac.cn; phxie@aiofm.ac.cn
作者简介:刘孟辉 ( 1997 - ), 安徽安庆人, 主要从事光电探测方面的研究。E-mail: mhliu3@mail.ustc.edu.cn
基金资助:
国家自然科学基金重点项目 (42030609)

Research on highly sensitive ozone detection technology based on high precision cavity

LIU Menghui 1,2 , TONG Jinzhao 1,2 , LIN Chuan 1,2 , HUANG Chenguang 3*, XIE Pinhua 1,2*

1 Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China; 2 University of Science and Technology of China, Hefei 230026, China; 3 University of Chinese Academy of Sciences, Beijing 100049, China

Received:2023-10-08 Revised:2023-10-30 Published:2025-05-28 Online:2025-05-28
Supported by:

摘要/Abstract

摘要： 本研究开发了一种基于高精密腔技术的高灵敏臭氧 (O3) 检测系统。该系统采用中心波长为266 nm的深紫外发光二极管 (DUV-LED) 作为光源, 以反射率为99.7%的两片高反镜构建了长为30 cm的光学腔, 其有效吸收光程达到84.7 m。首先探究了DUV-LED光源的稳定性及其中心波长处其他气体的干扰, 标定了该系统的有效腔长, 并进行了空腔消光值校准。随后, 采用艾伦偏差对系统的性能进行了评估, 评估结果表明集成后的系统在1 s时间分辨率下对O3的检测限为129×10−12 (1σ), 系统总不确定度为6.2%。最后, 为进一步分析系统的环境适应性和稳定性, 利用该系统在合肥科学岛综合楼开展了连续3 d的外场观测应用实验, 并与商业仪器Thermo-49i进行了同步O3测量分子浓度比对。观测结果表明两套系统测量的O3分子浓度数据具有较好的一致性, 相关性系数为0.98, 斜率为1.01, 截距为0.75, 验证了该系统测量的准确性和可靠性, 表明该系统能够应用于实际环境中O3的高灵敏度、高时间分辨率的测量。

关键词: 大气光学, 臭氧探测, 高精密腔技术, 深紫外发光二极管

Abstract: In this study, a highly sensitive ozone detection system based on high precision cavity technology was developed. A deep ultraviolet light-emitting diode (DUV-LED) with a center wavelength of 266 nm was used as light source, and an optical cavity with a length of 30 cm was constructed with two high reflectance mirrors with a reflectivity of 99.7%, which achieved an effective absorbing optical path of 84.7 m. Firstly, the stability of the DUV-LED light source and the interference of other gases at the center wavelength were investigated, and the effective cavity length and the cavity extinction value of the system were calibrated. Then, the performance of the system was evaluated using Allan variance, and it showed that the integrated system had a detection limit of 129×10−12 (1σ) for O3 at a time resolution of 1 s, with a total system uncertainty of 6.2%. Finally, to verify the environmental adaptability and stability of the system, the system was employed in a continuous 3 d comprehensive field observation at Hefei Science Island (China), and compared with the commercial instrument Thermo-49i. The observation results show that the O3 concentrations measured by the two systems have good consistency, with a correlation coefficient of 0.98, a slope of 1.01, and an intercept of 0.75. The consistency verifies the accuracy and reliability of the system in measuring O3, proving that the system can be applied to accurate measurement of O3 with high sensitivity and high time resolution in real environments.

Key words: atmospheric optics, ozone detection, high precision cavity technology, deep ultraviolet lightemitting diode

中图分类号:

O433.1

刘孟辉, 童金钊, 林川, 黄晨光, 谢品华, . 基于高精密腔的高灵敏臭氧探测技术研究[J]. 量子电子学报, 2025, 42(3): 381-390.

LIU Menghui , , TONG Jinzhao , , LIN Chuan , , HUANG Chenguang , XIE Pinhua , . Research on highly sensitive ozone detection technology based on high precision cavity[J]. Chinese Journal of Quantum Electronics, 2025, 42(3): 381-390.

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基于高精密腔的高灵敏臭氧探测技术研究

Research on highly sensitive ozone detection technology based on high precision cavity

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