基于反射式相位编码超表面的高分辨率横向位移测量研究

doi:10.3969/j.issn.1007-5461.2026.05.015

量子电子学报 ›› 2026, Vol. 43 ›› Issue (5): 838-846.doi: 10.3969/j.issn.1007-5461.2026.05.015

• 微纳光学 • 上一篇

基于反射式相位编码超表面的高分辨率横向位移测量研究

匡程辉 1,2, 臧昊峰 1,2*, 鲁拥华 1,2*, 王沛 1,2

1 中国科学技术大学光学与光学工程系, 安徽合肥 230026; 2 光电子科学与技术安徽省重点实验室, 安徽合肥 230026

收稿日期:2025-02-12 修回日期:2025-03-14 出版日期:2026-09-28 发布日期:2026-09-30
通讯作者: E-mail: zanghf@ustc.edu.cn; yhlu@ustc.edu.cn E-mail:E-mail: zanghf@ustc.edu.cn; yhlu@ustc.edu.cn
作者简介:匡程辉 ( 2001 - ), 江西吉安人, 研究生, 主要从事基于超表面的精密测量方面的研究。E-mail: zjkch@mail.ustc.edu.cn
基金资助:
安徽省科技攻坚计划 (202423k09020046), 国家重点研发计划 (2023YFF05501)

High⁃resolution lateral displacement measurement based on reflective phase⁃encoded metasurface

KUANG Chenghui 1,2, ZANG Haofeng 1,2*, LU Yonghua 1,2*, WANG Pei 1,2

1 Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China;
2 Anhui Key Laboratory of Optoelectronic Science and Technology, Hefei 230026, China

Received:2025-02-12 Revised:2025-03-14 Published:2026-09-28 Online:2026-09-30

摘要/Abstract

摘要： 紧凑型、大量程和高分辨率的横向位移测量系统在精密制造和相关基础研究中均至关重要, 然而, 研制同时具备百皮米级分辨率和百微米级测量范围的易集成测量系统面临巨大挑战。本研究提出并实验验证了一种基于反射式相位编码超表面的高分辨率、易集成的横向位移测量技术。该技术利用超表面的相位编码特性, 将横向位移映射至反射光的偏振旋转角度, 依据马吕斯定律可通过功率计测得光的强度, 从而直接读取位移信息。基于此核心思想, 设计并制备了510 μm × 510 μm 的反射式相位编码超表面, 实现了200 μm 量程、100 pm 分辨率的横向位移测量。同时, 该装置所有组件均集成至目标平台的一端, 为紧凑型、大量程、高分辨率位移传感器的实际应用提供了可能。

关键词: 反射式相位编码超表面, 横向位移测量, 高分辨率

Abstract: Compact, large-range, and high-resolution lateral displacement measurement systems are
crucial for both precision manufacturing and related fundamental research. However, developing an easily
integrable measurement system that simultaneously achieves hundred-picometer-level resolution and a
hundred-micrometer-level measurement range presents a significant challenge. In this study, we propose
and experimentally validate a high-resolution, easily integrable lateral displacement measurement
technique based on reflective phase-encoded metasurface. This technique utilizes the phase-encoding
characteristics of the metasurface to map the lateral displacement onto the polarization rotation angle of
the reflected light. According to Malus's law, the intensity of the light can be measured by a power meter,
thereby directly reading out the displacement information. And based on this core idea, we designed and
fabricated a reflective phase-encoded metasurface with an area of 510 μm × 510 μm, enabling lateral
displacement measurement with a range of 200 μm and a resolution of 100 pm. Additionally, all
components of the device are integrated on one end of the target platform, providing a practical solution
for compact, large-range, high-resolution displacement sensors.

Key words: reflective phase-encoded metasurface, lateral displacement measurement, high-resolution

中图分类号:

O436.1

匡程辉 , 臧昊峰 , 鲁拥华 , 王沛 , . 基于反射式相位编码超表面的高分辨率横向位移测量研究[J]. 量子电子学报, 2026, 43(5): 838-846.

KUANG Chenghui , ZANG Haofeng , LU Yonghua , WANG Pei , . High⁃resolution lateral displacement measurement based on reflective phase⁃encoded metasurface[J]. Chinese Journal of Quantum Electronics, 2026, 43(5): 838-846.

参考文献

[1]. B. P. Abbott, R. Abbott, T. D. Abbott, et al. Observation of Gravitational Waves from a Binary Black Hole Merger [J]. Physical Review Letters, 2016, 116(6): 061102.
[2]. M. Krieg, G. Fl?schner, D. Alsteens, et al. Atomic force microscopy-based mechanobiology [J]. Nature Reviews Physics, 2018, 1(1): 41–57.
[3]. R. G. Knobel and A. N. Cleland. Nanometre-scale displacement sensing using a single electron transistor [J]. Nature, 2003, 424(6946): 291–293.
[4]. M. J. Biercuk, H. Uys, J. W. Britton, et al. Ultrasensitive detection of force and displacement using trapped ions [J]. Nature Nanotechnology, 2010, 5(9): 646–650.
[5]. S. W. Hell. Far-Field Optical Nanoscopy [J]. Science, 2007, 316(5828): 1153–1158.
[6]. M. J. Rust, M. Bates, and X. Zhuang. Sub-diffraction-limit imaging by stochastic optical reconstruction microscopy (STORM) [J]. Nature Methods, 2006, 3(10): 793–796.
[7]. L. Verstappen, E. Mos, P. Wardenier, et al. Holistic overlay control for multi-patterning process layers at the 10nm and 7nm nodes [J]. SPIE Advanced Lithography, 2016, p. 97781Y.
[8]. N. G. Orji, M. Badaroglu, B. M. Barnes, et al. Metrology for the next generation of semiconductor devices [J]. Nature Electronics, 2018: 1(10), 532–547.
[9]. Z. Xi, L. Wei, A. J. L. Adam, et al. Accurate Feeding of Nanoantenna by Singular Optics for Nanoscale Translational and Rotational Displacement Sensing [J]. Physical Review Letters, 2016: 117(11), 113903.
[10]. M.-H. Chien, J. Steurer, P. Sadeghi, et al. Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution [J]. ACS Photonics, 2020, 7(8): 2197–2203.
[11]. N. Tischler, J. Stark, X. Zambrana-Puyalto, et al. All-Optical Self-Referenced Transverse Position Sensing with Subnanometer Precision [J]. ACS Photonics, 2018, 5(9): 3628–3633.
[12]. H. Zang, Z. Zhang, Z. Huang, et al. High-precision two-dimensional displacement metrology based on matrix metasurface [J]. Science Advances, 2024, 10(2): eadk2265.
[13]. S. Lin, Y. He, D. Feng, et al. Optical Fingerprint of Flat Substrate Surface and Marker-Free Lateral Displacement Detection with Angstrom-Level Precision [J]. Physical Review Letters, 2022, 129(21): 213201.
[14]. A. Bag, M. Neugebauer, U. Mick, et al. Towards fully integrated photonic displacement sensors [J]. Nature Communications, 2020, 11(1): 2915.
[15]. R. Wang, X. Lei, Y. Jin, et al. Directional imbalance of Bloch surface waves for ultrasensitive displacement metrology [J]. Nanoscale, 2021, 13(25): 11041–11050.
[16]. Z. Zhang, Y. Xiang, W. Xu, et al. Broadband transverse unidirectional scattering and large range nanoscale displacement measuring based on the interaction between a tightly focused azimuthally polarized beam and a silicon hollow nanostructure [J]. Optics Express, 2023, 31(10): 15372.
[17]. M. Ghahremani, A. McClung, B. Mirzapourbeinekalaye, et al. 3D alignment of distant patterns with deep-subwavelength precision using metasurfaces [J]. Nature Communications, 2024, 15(1): 8864.
[18]. A. Bag, M. Neugebauer, P. Wo?niak, et al. Transverse Kerker Scattering for Angstrom Localization of Nanoparticles [J]. Physical Review Letters, 2018, 121(19): 193902.
[19]. T. Zang, H. Zang, Z. Xi, et al. Asymmetric Excitation of Surface Plasmon Polaritons via Paired Slot Antennas for Angstrom Displacement Sensing [J]. Physical Review Letters, 2020, 124(24): 243901.
[20]. G. H. Yuan and N. I. Zheludev. Detecting nanometric displacements with optical ruler metrology [J]. Science, 2019, 364(6442): 771–775.
[21]. H. Zang, Z. Xi, Z. Zhang, et al. Ultrasensitive and long-range transverse displacement metrology with polarization-encoded metasurface [J]. Science Advances, 2022, 8(41): eadd1973.
[22]. A. Shaltout, J. Liu, A. Kildishev, et al. Photonic spin Hall effect in gap–plasmon metasurfaces for on-chip chiroptical spectroscopy [J]. Optica, 2015, 2(10): 860.
[23]. A. Arbabi, Y. Horie, M. Bagheri, et al. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission [J]. Nature Nanotechnology, 2015, 10(11): 937–943.

基于反射式相位编码超表面的高分辨率横向位移测量研究

High⁃resolution lateral displacement measurement based on reflective phase⁃encoded metasurface

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 9

编辑推荐

Metrics

本文评价

[1]	吴广坤#, 丁华峰#, 陈建军 . 金属微纳结构操控单光子发射体辐射[J]. 量子电子学报, 2024, 41(2): 185-193.
[2]	樊婷, 马小军, 王宗伟, 王琦, 何智兵, 易勇. 靶丸壳层折射率的白光干涉测量技术研究[J]. 量子电子学报, 2020, 37(6): 641-649.
[3]	邱冬王勇朱良富张斗国明海. 基于小孔-Tamm复合结构的荧光增强与定向辐射[J]. J4, 2018, 35(1): 1-6.
[4]	胡斌江兴方石晓灏刘磊邓林红. 全场光学相干层析在细胞成像中的应用研究[J]. J4, 2016, 33(4): 437-443.
[5]	李欣禹王乐杨贺赵生妹. 基于反射型物体的高阶周期衍射关联成像方案[J]. J4, 2014, 31(6): 696-702.
[6]	陈建军，李智，龚旗煌. [J]. J4, 2014, 31(4): 428-432.
[7]	丁立黄坤康学亮李永平. 利用级联衍射光学元件对多波长混合光实现聚焦、整形和分光谱[J]. J4, 2014, 31(1): 25-32.
[8]	杨晓芳. 含Rashba自旋轨道耦合二维电子气结构中电子反常位移及自旋分离[J]. J4, 2011, 28(3): 318-323.
[9]	高昆许立新王安廷明海刘洋王小兵程勇. 光纤激光器空间相干合束远场特性分析[J]. J4, 2009, 26(4): 417-420.