多通道彩色共聚焦成像系统研究

doi:10.3969/j.issn.1007-5461.2026.03.005

量子电子学报 ›› 2026, Vol. 43 ›› Issue (3): 375-383.doi: 10.3969/j.issn.1007-5461.2026.03.005

多通道彩色共聚焦成像系统研究

池田贵一 1,2, 臧昊峰 1,2*, 鲁拥华 1,2, 王沛 1,2

1 中国科学技术大学光学与光学工程系, 安徽合肥 230026;2 安徽省光电子科学与技术重点实验室, 安徽合肥 230026

收稿日期:2025-12-04 修回日期:2026-01-16 出版日期:2026-05-28 发布日期:2026-05-28
通讯作者: E-mail: zanghf@ustc.edu.cn E-mail: E-mail: zanghf@ustc.edu.cn
作者简介:池田贵一 ( 1998 - ), 日本福冈人, 研究生, 主要从事彩色共聚焦系统方面的研究。E-mail: chi2tian1@mail.ustc.edu.cn
基金资助:
国家重点研发计划 (2023YFF0715501, 2023YFF0715502), 安徽省科技创新攻坚计划 (202423k09020046), 国家自然科学基金青年项目(C类, 62505307), 中央高校基本科研业务费专项(WK2030000092)

Research on a Multi-Channel Chromatic Confocal Imaging System

IKEDA Kiichi 1,2 , ZANG Haofeng 1,2*, LU Yonghua 1,2 , WANG Pei 1,2

1 Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China;2 Anhui Key Laboratory of Optoelectronic Science and Technology, Hefei 230026, China

Received:2025-12-04 Revised:2026-01-16 Published:2026-05-28 Online:2026-05-28

摘要/Abstract

摘要： 针对传统点扫描彩色共聚焦三维成像技术中存在的扫描速度慢、系统复杂度高的问题, 提出一种基于光纤阵列与振镜光路切换的多点同步成像系统。该系统以32通道一维光纤阵列作为探测核心, 结合高数值孔径色散透镜与高速振镜切换机制, 实现了多测点快速采集与高精度形貌重建; 通过提出的峰值搜索算法, 有效提升了波长定位的准确性。标定结果表明, 该系统工作在580 nm波长处的纵向精度达0.14 µm, 工作在450~700 nm波长范围内的纵向精度为2.46 µm。在此基础上, 成功将该系统应用于集成电路的微观形貌检测。该系统在保持高分辨率的同时, 显著提高了测量效率, 具有良好的工业在线应用潜力。

关键词: 彩色共聚焦测量, 三维形貌检测, 光纤阵列, 光纤切换器

Abstract: To address the limitations of slow scanning speed and high system complexity in traditional point-scanning chromatic confocal three-dimensional imaging technology, a multi-point synchronous imaging system based on fiber array and galvanometer-based optical switching mechanism is proposed. The system employs a 32-channel one-dimensional fiber array as the detection core, combined with a high-numerical-aperture dispersive lens and a high-speed galvanometer, to achieve rapid multi-point data acquisition and high-precision topographic reconstruction. Furthermore, a peak-search algorithm is proposed to effectively enhance the accuracy of wavelength determination of the system. The calibration results demonstrate that the system has a longitudinal accuracy of 0.14 µm at 580 nm and 2.46 µm across the working spectral range of 450–700 nm. Based on this, the system has been successfully applied to the inspection of integrated circuit micro-topography. This system significantly improves measurement efficiency while maintaining high resolution, showing strong potential for industrial online applications.

Key words: chromatic confocal measurement, three-dimensional topography detection, fiber array, optical fiber switching

中图分类号:

O431.2

池田贵一 , 臧昊峰 , 鲁拥华 , 王沛 , . 多通道彩色共聚焦成像系统研究[J]. 量子电子学报, 2026, 43(3): 375-383.

IKEDA Kiichi , , ZANG Haofeng , LU Yonghua , , WANG Pei , . Research on a Multi-Channel Chromatic Confocal Imaging System[J]. Chinese Journal of Quantum Electronics, 2026, 43(3): 375-383.

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多通道彩色共聚焦成像系统研究

Research on a Multi-Channel Chromatic Confocal Imaging System

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